半导体行业对外测试设备介绍(精)

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SSM 2000 SRP

介绍

The spreading resistance technique is a method for measuring the electrical

properties of semiconductor materials with very high

spatial resolution; it is based on measurements of the

contact

resistance

of

specially

prepared

point

contacts

on doped silicon samples.

The SSM 2000 NANOSRP? System

is an automated spreading resistance probe designed to

characterize

the

electrical

properties

of

doped

silicon

materials.

This

system

generates

profiles

of

resistivity,

carrier

density,

and

electrically

active

dopant

density

more quickly and more easily than its predecessor, the

SSM 150. It is the most advanced SRP test machine in

world.

Silan characteristic

1

、

Can afford the best accuracy result for custom.

2

、

We have the unique ability to test the Ultrashallow layer. Example we can test

implant resistivity profiler on surface. We can guarantee 6nm resolution for

test Ultrashallow layer.

3

、

Can measure the resistivity of patterned samples (dimension of pattern above 80um)

.

扩展电阻率测试是用高分辨

率测试半导体材料的电特性。

它

基于被测样 片上接触的探针来

测试。

SSM 2000

< br>是一台自动的

用扩展电阻的方法来反应参杂

硅材料电特性 的机器。

它能产生

整个硅片电阻率的轮廓特性，

载

流子浓度，参杂浓度。

它比国

内常用的

SSM

150

要快速，准确

许多。是目前世界最先进的

SRP

测试设备之一。

士兰特点：

1

、能给用户提供国内最精确的

测试结果。

< br>

2

、是国内唯一有能力准确测试浅层结构，如注入表层 电阻率的变化特性。能保证

6nm

的分

辨率准确性。

3

、能测试图形中样品 的扩展电阻率（图形尺寸

80um

以上）

。

杭州士兰集成电路有限公司

< /p>

杭州经济技术开发东区

10

号路

308

号

Hangzhou Silan Integrated Circuit Co., Ltd

。

308, No. 10 Road, East HETZ, Hangzhou, Zhejiang, China 310018

FAX

：

TEL

< br>：

-7813

（邓先生）

dzt 51266042@

-7814

（杨先生）

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SSM495 C-V

测试仪

The SSM495 is an automatic mercury probe capacitance- voltage (CV) measuring

system.

The

SSM

495

has

an

advanced

measurement

tool

with

many

characteristics

such

as good spatial resolution, good sensitivity and non-destructive. The resistivity

of all kinds epi samples can be accurately measured using SSM 495. The measurement

range

is

from

0.1

to

100

Ω

.cm

in

n-type

wafer;

from

0.24

to

330

Ω

.cm

in

P-type

wafers.

The SSM495 can also be used to monitor oxide quality (Threshold voltage: Vth;

Flat band voltage: Vfb;

Oxide capacitance: Cox;

Effective oxide charge: Neff ).

In

addition,

it

can

offer

good

resolution

in

monitoring

the

implant dose of B, P or As in the

channel region under the gate.

SILAN Characteristic

We

can

test

most

of

P

type

EPI

wafer which is very hard for many

companies sometimes.

SSM495

全自动汞探针

CV

测 试系

统是先进的测试工具，具有空间分辨

率高、灵敏度好、非破 坏性等特点。

它能精确地测试各种外延片的电阻

率。