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Secondary process system
introduction
Working
characteristics
1
. Wafer factory
2
. Fab features and
capabilities of the gas required
3
. Chemical substances and
their properties required for fab
4
. Work contents
1
. Wafer factory
FAB
is
a
modern
plant
producing
chips,
the
main
workplace
for
the
cleanroom.
Clean room is a
constant temperature and humidity, temperature
is
21 °
c
.
Relative humidity
65%
. Fab clean rooms divided into the
diffusion zone
(furnace batch), yellow,
etching, thin film areas.
2
. Fab features and
functionality of the gas required
Due
to
the
manufacturing
process
on
the
need
and
use
of
many
kinds
of
gases
in semiconductor
factories. We generally are based on gas
properties to
distinguish words.
Specialty gases
and
gas
can
be
divided into two
broad
categories. The former to use less gas.
Such as
SiH4
,
and
NF3
. Which use
large
amounts
of
gas.
Such
as
N2
,
and
CDA
.
Due
to
a
larger
amount;
General
gas often
in
bulk gas
call. The
Bulk
Gas
. Specialty gas
-Specialty Gas
.
2-1 Bulk Gas
In the
semiconductor manufacturing process, need to
provide a
variety of high purity gas
used in pneumatic equipment power, chemicals
or pressure medium is used as an inert
environment, or take part in the
reaction or to remove impurities, such
as different functions.
Because of increasingly sophisticated
semiconductor production, its
requests
for
gas
purity
is
ever
mentioned.
Semiconductor
factory
will
be
briefly described below the general
quality requirements and the
necessary
equipment for gas and its functions.
2-1-1
Bulk gas
products:
Bulk
gas
Semiconductor
plants
can
use,
there
are
generally
CDA
、
GN2
、
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PN2
、
PAr
、
PO2
、
PH2
、
PHe 7
Species.
2-1-2
Bulk gas
manufacturing:
<1>
CDA/ICA(Clean Dry Air)
Clean, dry
air.
CDA
Sources
taken
from
the
air
compressed
by
compressor
dehumidifier,
then
by
a
filter
or
activated
carbon
adsorption
to
remove
dust
and
hydrocarbons
to supply the
clean room
CDA/ZCD
。
CDA
System:
Air compressor
Buffer storage tank
cooling dryer
Filter
CDA
<2>
GN2
Compressed using compressor cooling gas
into liquid gas. Catalytic
converter,
CO
reaction
to
CO2
,
H2,
reaction
to
H2O
,
then
sieve
absorption
of
CO2
, and
H2O
And
then slip separation
O2&CnHm
.
N2=-195.6°
C
O2=-183°
C
PN2
GN2
Through the Purifier
(Purifier)
Purification, producing high
purity
N2
。
Liquid original nitrogen
purity
99.9999%
After
purification for purification of nitrogen
purity
99.9999999%
GN2&PN2
System(
See attached map
)
<3> PO2
Compressor
compressed
cooled
gas
into
liquid
gas,
awarded
by
second
slip
99%
Above in purity
O2
And then drop
N2
、
Ar
、
CnHm
。
Another by
electrolytic
dissociation
H2&O2
PO2
System
(See photos)
<4> PAr
Compressor
compressed
cooled
gas
into
liquid
gas,
awarded
by
second
slip
99.0%
More purity argon.
Ar
content in the air is
only
0.93%
. Production
costs are relatively high.
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PAr System (
See
attached map
)
<5> PH2
Compressor
compressed
cooled
gas
into
liquid
gas,
awarded
by
second
slip
99.0%
Above
in
purity
H2
。
Also
by
H2O
electrolytic
dissociation
H2&O2
.
High hazard
manufacturing cheap but easy to trigger
explosions.
PH2 System
(
See attached map
)
<6> PHe
Rare
and
rich
He
Extracted
from
natural
gas,
its
main
origin
for
the
United
States, and Russia. Air compressors
compressed cooled gas in liquid,
easily
obtained from the slip.
He
lium=-268.9°
C Methane
(
Methane
)=
-161.4°
C
PHe System
(
See attached map
)
2-1-3
Use of bulk gases in
semiconductor plants
CDA
Main supply
FAB
Pneumatic device powered air source
and blowing
(Purge),Local
Scurruber
Fuel it.
ICA
Main facility system
pneumatic equipment-powered gas source and
blowing.
N2
Main
supply
part
of
the
pneumatic
equipment
air
supply
or
supply
blowing
and dilute source of pressure of inert
gas and chemical delivery.
O2
Supply
ETCH
-Process oxidizer needed and
CPCVD
Supplies oxidation
process
with
business
routine
supply
O3 Generator
Required
O2
Supplies
and
other processes required.
Ar
Supply
Sputter
Manufacturing process and ion
sputtering heat transfer
media
Chamber
Dilution and inert gas environment.
H2
Feeding
tube
devices
burning
mix
of
oxygen,
POLY
Manufacturing
process
H2 BAKE
Purposes.
W-PLUG
manufacturing process as
WF6
for the reduction
of gas and
other processes.
He
Pressure medium supply
chemicals and processing chips cool.
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Bulk Gas
Although
not
as
Specialty
Gas
,
Some
with
highly
toxic
and
corrosive.
But
we
still
need
to
pay
attention
to
safety
using
a
bulk
gas.
GN2
,
and
PN2
,
and
PAr
,
and
PHe
has the danger of
suffocating, that gas is colorless and
odorless, massive emission of lead in
the air contain
O2 (
Usually
21%)
,
decreased
to
16%
below,
namely,
headaches
and
nausea.
Dang
O2
less
to
10%
Shi,
who
will
be
in
a
State
of
the
will
is
not
clear,
6%
,
instantly
Faints,
unable to breathe,
6
minutes less than death.
PH2
due to leakage or when
mixing, concentration of his own as
long as the
H2
of the blast
RADIUS
(
4%-75%
)
(air),
if
they
got
the
fire
burning
this
gas
is
mixed.
PO2
will
make material easily
oxidized to yield burning, causing fire mishap.
Therefore, our works in the
semiconductor, in the design, construction,
and how to avoid leaks, and how to
protect themselves from, you are one
of
our hard work.
2-2
Specialty
Gas
Used by the semiconductor
factory
Specialty Gas
A wide
range of about
40 or
50, according to risks can be divided
into the following categories:
2-2-1
Flammable
gases
When some leaks gas
when mixed with, as long as his own concentration
in
a
certain
range
(air),
if
they
got
the
fire,
this
gas
is
burning
from
the
mix. This called the
explosion of the gas range. Such as:
SiH4 1.35%-100% SiH2CL2 4.1%-98.8% PH3
1.32%-100%
2-2-2
Low
pressure gas
Some gases
under normal for the viscous liquid gas at room
temperature
of saturated vapor pressure
is less than
10Psi
, Can
also interfere with
pipeline
blocked,
need
to
pack
heat,
improving
the
air
vapor
pressure
can
be an adequate supply of
gas. For example:
DCS
,
and
CLF3
, and
WF6
2-2-3
Toxic gas
Some gases due to its strong reaction
of animals (including humans)
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respiratory and
mucous membranes, skin and other features with a
strong
impact. Such
as:
NF3,PH3
2-2-4
Corrosive gases
Some gas and water effects, that is
produced by hydrolysis
HCL HF
Acidic
substances such as,
the human body (including eyes, nose, skin,
respiratory system, etc) and equipment
(such as piping and valves) have
a
corrosive effect. This gas has the
following:
<1>
HCL
、
CL2
、
SiH2CL2
、
BCL3 CL
Elements of gas
---HCL
<2> BF3
、
SiF4
、
WF6 F
Element
---HF
<3>
NH3---
Ammonia water
Very irritating
2-2-5
Asphyxiant
gases
Such
as:
CO2
、
CF4
、
C2F6
Such
gases,
odorless
and
tasteless.
If
a
large
number of emission of
air caused by
O2
content
reduced to
16%
when the
headache and nausea. Dang
O2
less to
10%
Shi,
who will be in a State of
the will is
not clear,
6%
,
instantly
Faints, unable to
breathe,
6
minutes
less than death.
2-2-6
Spontaneous combustion
gases
Some
of
the
gases,
mixed
with
the
air,
even
without
the
fire
catches
fire
spontaneously burst into flames. This
is called spontaneous combustion
gases.
Its fire at room temperature. This gas
are:
SiH4
、
PH3
、
B2H6
Though we
cannot exclude these gases can cause various
adverse effects
on us. But we working
in semiconductor plants, may be included in the
design, construction, and stop loss. To
avoid leaks, he stressed.
3
．
Fabs require
chemical substances and their
properties
3-1
Types of chemicals
(solvents)
C260
、
EKC-270
、
NMP
、
OK-73
、
A515
、
IPA
In
addition
to
EKC-270
PFA/
304
BA
Tube,
others
use
316L
EP
Tube.
Take
over
the
way
with
VMB
outlet
and
the
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machine inlet
side takes over.
3-2
Chemical species (pH class)
HF1%
、
HF49%
、
H2O2
、
NH4OH29%
、
DEVELOPER
、
M1
、
BOE 200:1
、
BOE 500:1
、
BOE 50:1
、
HNO3
、
HCL
、
H3PO4
、
H2SO4
。
Used
PEA/CLEAR
PVC
double pipe bend
directly,
take over the way with
VMB
outlet and the
machine inlet
side, inner tube direct expansion tubes. Outer
tube using
the
40A C-PVC
SOKET
fixed.
3-3
Chemical characteristics
See table below
Serial number
-Chemical
name
chemical
characteristics
1 H2SO4
Sulfuric
acid
Highly corrosive
liquids
2 H3PO4
Phosphoric acid
Corrosive liquids
3 HNO3
Nitric
acid
Highly corrosive
liquids
4 HCL
Hydrochloric acid
Liquid corrosive irritant
5 BOE 50:1
Etching solution
The corrosive and toxic
liquids
6 BOE
100:1
Etching solution
The corrosive and toxic
liquids
7 BOE
200:1
Etching solution
The corrosive and toxic
liquids
8 DEV
Developer
Corrosive liquids
9 NH4OH
Ammonia
water
Strong irritant
liquid
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10 H2O2
Hydrogen peroxide solution
Irritant, corrosive liquids
11 M1
Nitric
acid hydrofluoric acid mixture
Highly corrosive liquids
12 49% HF
Hydrofluoric acid in aqueous
solution
Corrosive
liquid
13 1% HF
Hydrofluoric acid in aqueous
solution
Corrosive
liquid
14
Thinner
Crystal cleaning
liquid
Flammable
liquids
15
EKC270
Liquid photoresist
removal
Corrosive and
irritant liquid
16 A515
Developer
Flammable, irritant liquid
17 NMP
Ka
ketone, methyl
Flammable,
irritant liquid
18 IPA
Isopropyl
alcohol
Flammable, toxic
liquids
19 C260
Fountain solution
Flammable, irritant liquid
4
.
Work contents
The
work
we
do
is
the
use
of
automated
tools
such
as
welding,
pipe
Bender.
Air
bottle
cabinet
(or
tank)
side
set
up
the
pipeline
to
FAB
reserved
near
the
machine and open the valve in the
TAKE
OFF
point (this is referred to
as a distribution). Then
TAKE OFF
point preparation pipeline to
contact
secondary with (
HOOK
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Introduction to
semiconductor materials of piping and
valves
1.
Pipe
fittings
---Pipe&Tube
2.
Connecting
accessories
---Fittings
3.
Valves
---Ultra Clean Valves
4.
Pressure regulating
valve
---Pressure Regulator
5.
Pressure
sensors
---Pressure Gauge&Transducer
6.
Filter
---Gas
Filter
7.
Selection of
materials based on
8.
Two-disc set of the form
1
．
About Pipe&Tube
1-1.
According to material
pipe can be divided into:
<1>SUS 304
<2>SUS 316
<3>SUS 316L
The
difference is that
SUS316
Add mo (
Mo
)
Metals, improve their
mechanical
properties.
L
Said material to
reduce
C
Increased nickel
(
Ni
).
1-2.
According to
specifications classification can be divided
into:
<1>
Sundials
(
JIS
):
PIPE SIZE
<2>
American Standard
(
ASTM
):
TUBE
SIZE
It should be noted
that:
<1>1
Outside
diameter
OD 34.4mm, TUBE SIZE OD 25.4mm
<2> PIPE SIZE 25A
Also known
as
1
Also known as
2
Also known as
3
Also known as
4
<3>TUBE SIZE
(Generally
used
in
1
Piping)
,
Common
sizes
1
/
8
(A),
2
/
8
(B),
3
/8
(Three
points),
4
/
8
(D),
5
/8
(Five points),
6/
8
(Six points),
1
。
1-3
．
According to
the classification of surface treatment
methods:
Is generally
divided into three
<1>AP
(
Annealed
and pickled
) Level (plain tubes):
pickling tube
<2>BA (Bright-
annealed)
Grade: bright annealed
tube
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<3>EP (Electrolytic
polished)
Level: electrolytic polishing
pipes
Note: the factors
affect the price of pipe is the most important
determining
factors
in
surface
treatment
methods,
the
height
of
the
price
order
EP>BA>AP
。
1-4.
According to the
differentiated thickness:
General
thickness
specifications
SCH5S
、
SCH10S
、
SCH20S
、
SCH40S
。
1-5.
Pipe manufacturing
process can be divided into:
<1>SINGLE MELT
<2>DOUBLE
MELT
(Aimed at reducing tube impurities
and increased
corrosivity)
example:
VIM+VAR
(
SUMKIN
Patented nicknames)
VIM
—
VACUUM
INDUCTION MELTING
VAR
—
VACUUM ARC
REMELTING
1-6
．
Welded and seamless pipes can be divided into two
types.
2
．
About Fittings
2-1.
Material and pipe
fittings.
(EP/BA...)
2-2.
Commonly used
categories:
<1>Nut+Gland+Gasket
<2>Elbow
、
Tee
、
Reducer
<3>Cap
、
Plug <4>Connector
Connector
2-3
．
Types and
specifications:
Can
generally be divided into
VCR
(1
/8 ),/SWG (1 ?
)/Welding/
Screw the
streets
/Flange
Size from
1
/8
/
4
—
300A(We
lding/Flange)
Short
connector
SCM(micro) or
Long
connector
SCL(long)&SCF
2-4.
Label:
KITZ/HAM-LET/IHARA/SWAGELOK/FUJIKIN
N2O
、
CO
、
O3
—
Gasket must be SUS
Note:
the gas used
Gasket Ni
Material.
CO Ni
has eroded, so the
CO Gasket
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must be a
SUS
series material.
3
．
About Valves
3-1
．
Material
with tubing
3-2
．
Commonly
used categories:
<1>
Manual
valve
(Manual Valve):
Ball
valve
(Ball
Vavle1
/
4
/
< br>4
Corrugated
pipe
valve
(Bellows
Valve1
/
4
large
size,
used
for
high
pressure
)
Diaphragm
valve
(Diaphragm
Valve1
/
4
for low
voltage high
)
<2>
Pneumatic
valves
(Air Valve)
:
a.
Use the air control valve
open or closed source, achieve the purpose
of automation, pneumatic valve itself
has a long drive (
Normally
Open//N.O.
)
Long
closed
(
Normally
Close// n.c.
)
With
two
more
commonly
used
for
N.C.
b.
Pneumatic valve actuation
forms are divided into:
Diaphragm type pneumatic valve
(
Air Operated Diaphragm Valve
)
Generally
<3000psi
Pneumatic valve of the corrugated pipe
(
Pneumatic Actuated Bellows Valve
)
Generally
>300psi
<3>
Check valve
(Check Valve):
Also known as one-way
valves, check valves,
main functions
for the maintenance of the pipeline gas (liquid)
unidirectional flows, preventing the
damage caused by upstream.
<4>
Pressure relief valve
(
Relief Valve
)
:
Also known as the safety valve,
its function is to maintain system
pressure, when the pressure exceeds
safety when setting pressure, will be
via the pressure relief valve.
<5>
Voltage regulation
method (
Regulator
)
:
Also known as
the reducing
valve, main function is to
change the gas from high pressure inlet port
(
HP
)
,
Adjusting the working pressure, then
the outlet port (
LP
) Flow
to the pipe or device.
Voltage regulation method for gas
should be used, piping and equipment
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requirements,
and can distinguish between two broad
categories:
a.
For general industrial use
Instrument (
banned oil
treatment
Oil Free),
Applicable gas
purity, non-
corrosive, non-toxic, non-flammable (such
as
N2,He,CDA, Ar
......
)
b.
Semiconductor
High Purity
(BA/EP )
Apply to gases with high
purity and
corrosive, poisonous,
flammable (such as
H2,HCL,H2
/N2......
)
3-3
．
Label:
KITI/OHNO/IHARA/MOTOYAMA/NUPRO
NH3
—
Check Valve
must be AFLAS type
3-4.
Notes
<1>
High
pressure
valve
/
Low
pressure
valve
According
to
different
places
to choose
<2>
Two
way
valve
/
The
three-way
valve
/
Four-way
valve
/...
According
to
your
demand to select, pay
attention to the flow of choice
4
．
About Regulator
4-1.
Material and pipe
fittings
4-2.
Frame
material:
PCTFE
、
SS316L
、
Kel-F81
4-3.
Commonly used
categories:
<1>
High voltage
/
Low-voltage
/
General pressure
<2>2P
No header
/
3P or 4P
Single or double
headers for the table header
<3>VCR/SWG/Flange
4-4.
Note:
<1>Bulk Gas
General
use
316L BA 316L EP /VCR SWG
1
/
4
—
R25
Series
3
/8
—
R35
Series
1
/2
—
RH1
Series
Because of
different flow
<2>Specialty
Gas
a:
Toxicity
/
Flammability
/
Noble gases:
316L
EP
—
L25 or R25
Series
b:
Corrosive
gases:
VIM+VAR
—
L25 SVA
Series
c:
Low
pressure
gas:
adjustable
negative-pressure
types
should
be
selected
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(type)-L96SSA
Series
5
．
About Pressure Gauge & Transducer
5-1.
Popular
categories:
<1>Pressure
Gauge(PG)
Pressure gauge head pointer
type,
C122
<2>Pressure Switch
(PS)
Pressure switches, analog, with
transmission
lines,
IPS122
<3>Digital Pressure
Gauge(PID)
Electronic pressure
gauge
<4>Pressure Tranaducer
(PT)
Pressure transmitters
5-2
．
Pressure
range can be divided into:
<1>
High voltage
(0
—
3000Psi)
<2>
Low-voltage
(-3
0
—
0
—
30
Psi)
(-30
—
0
—
160Psi)
5-3.
Power supply:
24V DC 4
—
20Ma DC
6
．
About Gas Filter
6-1.
Features: filtering
particles in the air
(particle)
6-2.
Filter grade option,
that is, filter diameter
(particle
size),
Can be
divided
into:
0.01um/
0.03
um/
0.003um
(
Micron
)
6-3.
Center filter
(Medium)
Material:
PTFE/SS
316L/Ni (
tiefulong
/
stainless
steel
/
nickel
)
6-4.
Flow
(Flow
Rate)
General flow and high
flow
30slpm/100slpm/
< br>300slpm/1500slpm
ting type:VCR or
SWG or Welding
6-6.
Common
filter material:
<1>Bulk
Gas
—
PTFE
<2>Specialty
Gas:
Toxicity
/
Flammability
/
Inert gas
—
PTFE
Series
Corrosive
gases
—
PTFE
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For
CO
—
PTFE type
Filter effects
Leak-
capture
rates of
anti-corrosion
performance
PTFE(F)
Good
Bad
>10.8 N/A
SS316L(M)
Very
good
Well
6
.
2
bad
Nickel(Ni)
Very good
Very
good
>10.8
good
7
. Selection of materials
based on
7-1
．
Types of
gases, gas properties
:
Effects of material
grade:
AP/BA/EP/V+V(VIM+VAR)
7-2.
Owners needs and
budgets
Note there is no
specified brand or specifications
7-3
．
According to
the dosage required for machine and its own
contacts
selected material
size
Dimensions that affect
the materials used:
1
/
4
、
<
/p>
3
/
8
、
1
/2
、
15A
7-4.
Machine
required material pressure and flow different
options form
Selection of
pressure ranges flow from suitable for valves. (
1
/
4
—
3
/
4
)
7-5
．
Depending on the disc Assembly choose component
joint type
VCR
—
F or M; SWG
Welding
7-6.
Operating
temperature,
Cost
8
. Two-disc set of the
form:
In general have the
following common forms:
<1>Specialty Gas
(No disk
group,
VMB/VMP
Replace)
<2>Bulk
Gas
EP
Level by
the
Diaphragm
Valve+Regulator+Gauge+Filter
Composition
BA
Level by the
Ball Valve+Regulator+Gauge
Composition
Note:
close
the
secondary
disk
group
when
piping
Parts
Structures
will
not
be finalized after
discussions with the owner.
Construction specifications
1
. Piping
erection
13
半导体知识厂务讲座
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2
. Bends tubing
specifications
3
.
Pipe cutting and milling surfaces
4
. Installation of pipe
joints
5
.
Specification for welding
6
.
CHEMICAL HOOK-
UP
specifications
1
. Piping
erection
1-1
Prefabrication work
environment
To be equipped
with a temporary clean Studio
(Clean
Booth)
And all piping
work
operation within this area basically completed, in
order to avoid
undue pollution.
This clean
Studio
and control must be
maintained in
the
following environmental
conditions:
Temporary clean
Studio:
a.
Number
of dust (static, particles smaller than
0.3um
)
1um=0.001mm
:
(
Human hair
100um)
Warehouse
:
(Disc
used
for
storing
materials
and
prefabricated,
fittings,
etc)
The
cleanliness
is
Class 10000
。
Class 10000 Clean Booth
measured
the
amount
of particles
(
0.1um
particles above)
cannot exceed
10000 PCS/c.f
Cutting work areas
: Class
1000
For cutting tubes, assembled disc,
and so
on.
Welding work area
: Class
100
For weld, prefabricated pipe
fittings.
b.
Maintain clean conditions:
Welding work area, the
temperature
21°
C
Relative humidity
65%
。
c.
Airflow:
Cycles
per hour
5-10
d.
The environment:
This Studio to maintain positive
pressure environment
30Pa,
Enough to
block particles,
grease and other foreign matter.
14
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e.
Work
in
this
area
must
be
dressed
in
clean
clothes,
shoes
and
PVC
Gloves.
When
the
number
of
particles
overweight,
should
reduce
the
number
of
clean
room
or
replace
MEPA
Filters
do
test
again,
until
it
reaches
the
standard
before starting
work.
1-2
Prefabricated (in a simple clean
room
clean booth
)
1-2-1
．
Rong
<1>
Rong
solution
automatically,
if
the
pipe
diameter
is
greater
than
20A
According to Rong is required.
<2>
Rong
occasions,
prior
to
construction
to
determine
persons
need
to
be
performed by a
qualified
BACK SHIELD
Compliance gas flow and purity
requirements.
<3>
Rong is confirming that
two sections of piping treatment compliance,
and distribution centers.
<4>
Rong Shi
镕
intake should
be
less than
the
thickness of the pipe
1
/
3
。
<5>
Rong
interval
according
to
tubing
size,
but
ordinary
by
equally
spaced
around the implementation.
<6>
Fake
film,
identified
Rong
Rong
to
clean
surfaces
after
acidification
with the flat
surface of piping.
<7>
When using automated Rong
Rong, under the same conditions, be in the
real Rong samples to determine without
any problems.
Rong
location
4
Point
or
6
1-2-2
. Chong-blown gas
(
Back seal gas
)
Using
argon
gas
dew
point
-80°
C
Or
lower,
the
oxygen
content
in
the
0.1ppm
Here,
particles (
0.1um
More)
content is zero.
1-2-3.
Rush blow tubes for sleeve
Connecting impulse gas pipelines and
erecting the pipeline using (
Back
seal jig
)
15
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As shown in figure (a)
shows
Figure (a)
1-2-4.
Set up procedure
(figure II)
Will work on the
both ends of the pipe sleeve tubing, connect
flushing
gas and valve
1-2-5.
Encapsulated
After
completing the welding, tube full
Ar
Gas, and wrapped with plastic
dust-free paper at the end of two
layers. If the valve is connected at
the end of the, wrapping paper with
plastic valve.
1-2-6.
Storage and
handling
Materials
must
be
placed
in
a
special
storage,
on
site
or
in
the
material
to provide a
temporary simple clean room, all material should
be placed
in order. In-store materials,
electronic polished fittings must be
separated and without electronic
polished fittings. When not using
fitting plastic wrappers should not be
opened until until the site can
be
opened only when you want to use, and materials
should not be placed
directly on the
ground.
1-3
Site welding
1-3-1
．
Spot
welding
personnel must be trained in
identification of high
purity piping
technique adopted.
<1>
Reset the scene
intact.
<2>
The
pipe being welded tube removed and
connect
Back seal gas
。
<3>
Rush blows clean welding
pipe end
Back seal gas
Removed, and start
welding.
16
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1-3-2
．
Pipeline
maintenance conditions
Even
if weld ends, also want to maintain a
small
N2 Ar
Tube, rushed to
prevent air blowing into the tube.
1-4
Pipe
fixing
1-4-1
．
Plumbing
fixtures
not
burden
with
the
construction
on
the
piping.
1-4-2.
Construction
plumbing
is
not
the
correct
angle
in
combination
is
not
available to support
correct.
1-4-3.
Piping connecting
section (Rong) cannot set support.
1-4-4.
Construction
of pipe
supports
must
be
in
accordance
with
the
design
basis.
1-4-5. U
Shaped-beam fixing pipes, consider
piping thermal expansion and
contraction and seismic occurrence of
such abnormalities, do not bundle
too
tight, fit piping route construction.
1-4-6.
Vibration of piping
may be affected by the occasion, to be joined
with the support structures and piping
vibration cushioning material.
1-4-7.
Fixed piping, must
take into account the future needs, to reserve
space.
1-4-8.
Outdoor piping and
corrosion protection of buried piping shall be
in the strategy. (Especially when
buried piping shall be discussed in
detail with experts)
1-4-9
．
General
plumbing fixed settings in the following
figure:
1-4-10
．
Piping
should
be
considered
material
even
when
fixed,
corrosion
properties selected are
compatible.
1-4-11
．
Support
when under the influence of vibration of piping,
shall
be in the policy response.
(Reference design)
1-4-12
．
Support
the manufacture must be taken according to the
rules of
semiconductors, avoid
superficial injuries.
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1-4-13
．
Pipe
support
materials
must
also
ban
oil,
wipe
with
alcohol
before
Assembly.
2.
Bends tubing
specifications
2-1
Pipe bending operation should pay
attention to two principles:
2-1-1
．
Surface
at
both
ends,
from
the
short
side
first
and
begin
to
bend.
Mark
will
be
relatively
short
length
tubing,
this
section
should
be
placed
in
the
Bender
The
left,
Set
The
second
place.
Bent
Latch
fixed
Pipe
,
slide
the
tubing
to the top, rotate
90 °
to complete bends.
Piping the scars from above have the
following.
<1>Latch
Parts of the
scars
<2>Bending
Some
scars
Between the two
scars,
<2>
Scars to pay
special attention to. Section at
the
end of tubing,
Swage Lok
joint rings will produce
100%Leak
problems.
Latch
scars will not occur to some circles
this kind of problem.
2-1-2
. Ends of side
bend
180 °
(
r-
bend), must be
180
°
bending operations.
This time,
r
mark
bending
dimensions in the plumbing, and
this
deal
Bender
left to
Set
.
2-2
Pipe bend of
the actual
2-2-1
.
90 °
bend
*
Mark
size,
Set Bender
Is
to
the
left
(for
example,
when
you
start
bending
some)
Stop pim
Pressed, as a reference point.
2.
Dash and
marking pipe
Link
Mark
superimposed on
90°
And then use the
Latch
Fix.
handle
0°
Fore Handle 0°
Agree together.
handle
Rotate to
Fore handle
90°
Wire, bend the pipe.
5. Score
To
check if there is at right angles.
*
Mark size,
Set
Bender
Right side
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Distribution mark crossed
and
Link
Mark
R
Fit, like any other order.
2-2-2
.
180
°
(
r-
bend)
1.
Line size of the
distribution mark, set in the
Bender
The left side.
2.
Dash and
Link
90°
Fit.
3. Shoe Handle Fore Handle 0
Points will be
Shoe Handle
Fore Handle 180°
Wire
bending.
4.
90°
Bent the same
way,
Sus
Pipe
bending
Spring Back
, So
bending can bend
quite a bit.
2-2-3
．
Bending
45 °
1.
Mark
dash,
placed
either
on
the
left
or
right
can
be.
Distribution
line
Link 45 °
joint.
2. Shoe Handle Fore Handle
0
Points will be
Shoe Handle
Bending to
Fore Handle
45°
Line.
3.
Correcting a
bending angle.
2-2-4
.
45
°
bend
1.
Underlined
the
size
of
the
mark,
either
placed
in
the
Bender
Left,
right,
are both available.
Will
Link
the above scale is
divided into
0-45 °
, the
angle value in purpose be underlined.
2. Shoe Handle Fore Handle
0
, And then
Shoe Handle 0
Bending to
Fore Handle
Scale
30°
Quite a line.
3.
Correcting a bending
angle.
2-2-5
.
45 °
-75 °
bends
1.
Underlined
the
size
of
the
mark,
either
placed
in
the
Bender
Left,
right,
are both available.
Link
Shang
45-R
, and
r
as
a
90 °
equal,
then use an
underscore to make solving
the angle value.
2. Shoe
Handle Fore Handle 0
Points will
be
Shoe Handle
Bending
to
Fore Handle
Solving the
point value on the scale.
3.
Correcting a with the
angles.
19
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2-2-6
.
75 °
-89 °
bends
Use formal
procedures to be curved
90°
Using
Vice
Distribution point back
to
ask for.
45°
—
89°
Desire among
the
bending angle is
more difficult at design time,
select this angle should be avoided.
3.
Pipe cutting
and milling surfaces
3-1
Large diameter pipes
1.
In principle should cut
clean booths within the implementation. But if
a customer's clean room completed, can
be cut in his clean room. (But if
cutting produces chips, not in the
clean room implementation of the
occasion)
2
．
Should
confirm
that
no
harmful
traces
on
the
surface
of
piping
before
cutting or destroy it.
3
.
Piping
must
be
used
when
cutting
stainless
steel
laser
cutting
machine
(
STAINLESS STEEL TUBE
CUTTER
) slowly cutting, keep the
sections at right
angles (
90
°
± 0.5
).
4
．
Should cross
into horizontal fixed in principle, prevent chips
from
entering the tube.
5
. Pipe after cutting is
required to
AIR GUN
with
clean gas scavenging,
cut face should
be in the downstream direction.
6
. After cutting the tube
attached to the chip or other impurities,
dust-free cloth should be used
(
LINT-FREE CLOTH
) to clean.
7
．
Special section of the processing application is
processed after
cutting
sections.
8
．
Cut
processing, in order to prevent chips from
entering the tube,
should
place
the
machined
surface
in
nasty,
washed
clean
gas
from
the
upper
class.
After processing, cut-side down, knock a few times
from above,
removing impurities of
chip.
20
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9
. Cut the
processing end, confirm that the section dealing
with good.
If
checked,
using
high
purity
industrial
Ar
gas
removal
pipes
appearance.
10
．
Such
as
Canal
and
no
impurities
or
anomalies,
in
stamped
on
both
ends.
11
．
If not
cutting, decentralized across levels of piping
tubes cannot
be used.
3-2
Small-diameter piping
(
1
/
4
—
1
/2
)
1.
Guarantee
Cutter
Vertically
with
the
pipes,
so
as
not
to
damage
the
blades.
2.
An entry must not
be too
deep,
or
you
will make incisions
into
the oval
and damage
Cutter,
Handle rotation angle
30°
Can be. When you start
cutting
must
be
rotated
before
and
after
3-4
a
half
weeks,
to
ensure
that
the
ports
on the
same level.
3.
Cutting is completed,
while checking the incision, to tilt the pipe,
read from bottom to top, attached to
prevent chips from getting holes in
it.
4.
View cut off diameter
shall not give rise to a spiral
scratch.
5.
After
the cut is completed, formation of the cone-shaped
cut and raw
edges using end-face
finishing cut, to form a flat surface in order to
facilitate welding:
<1>
End machines never feed
too much at one time or speed is too fast, so
as to avoid port oxidation due to
overheating.
<2>
Ensure that the pipe and
port into a vertical position.
<3>
Chamfer in addition to
Flash, chamfering device perpendicular to the
port, pipe inclined downwards to
prevent filings entering the tube.
Note: piping modifications, the cut
should be avoided and must be used
when
cutting large flow
Ar
Rush
blows.
4.
Installation of pipe
joints
4-1
COMPRESSION TYPE
1
The following
dimensions
)
21
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1. COMPRESSION
TYPE
Joining, usually shown in the
following figure.
2
．
Installation
procedures,
implemented
according
to
the
following
steps.
<1>TUBE
Tube is inserted into
an interface, determine the pipe firmly
embedded in the interface, and then to
embedding degree mark.
<2>
In order to determine the
interface,
TUBE
Pipes
together, and slowly
loosen the screw
cap, confirmed
TUBE
Pipe
metal ferrule is inserted
correctly
before and after.
<3>TUBE
When
the
tube
within
the
interface,
with
a
special
spanner
tighten
until finger tight
(
FINGER TIGHT
), Set this
point as the screw starting
point,
mark.
<4>
Interface
with
a
special
spanner
fixed,
rotate
the
screw
cap
1
1
/
4
Times.
<5>
After
installation, using Special Inspector to check the
gap between
the screw and
the.
4-2 METAL GASKET TYPE
GASKET TYPE
Interface
structure is as follows.
2
．
Installation
procedure according to the following
steps
<1>
Because
after
piping
connection
cannot
be
corrected,
must
be
assembled
before the match point is
correct.
<2>GASKET GASKET
RETAINER
Fitted body
GLAND
But must be careful not to
hurt the body. Once the scars all the
seal will be affected.
<3>
Combine other parts,
rotating female nail Cap tightly.
<4>
Nail CAP in males and
females for a token.
<5>
Using
special
spanner
fixed
body
and,
at
316
Stainless
steel
and
NICKEL
GASKET
Occasions, finger
tight and then rotate
1
/8
Times.
<6>
Such as the use of
free
RETAINER GASKET
To re-
establish joints should
be
used
when
a
new
GASKET
。
Such
as
the
use
of
RETAINER
GASKET
,
according
to above steps to bonding (up
to
3
times).
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4-3 NPT
Connector
installation
1
.
NPT
thread form one end of
the connector for the
SWG
-Connector and
the other end
to nipple.
2
.
NPT
is connected to the
seat, with Teflon tape (
TYPE-
SEAL
) leading to
progressive
bills winding clockwise to the end
3-4
.
3
．
When
connected
to
the
machine,
start
off
by
hand
tightening
the
joints,
then force
tightening wrench.
4
. Connect the lines
with
SWG
-joint
end
4-4 Flange
Connector installation
1
.
Flange
joints for large valves in connections
of the construction
inspection
Flange
for defects, and determine the cleaning
surface.
2
.
Flange
with Argon welding
joints, insert the tube
Flange
front
2-3mm
depth
of spot welding; with hand-welding
Flange
front extended
circumference
welding
a
lap,
then
welded
in
the
same
manner
Flange
Back
if
the
first
Flange
The
back
will
most
likely
contamination
Flange
Positive
and
lead
to leaks, so it is important to first
Flange
Front part.
3
．
Note
When
welding
with
metal
connections
into
a
vertical
shape,
weld
may
not have holes, welding slag and cracked fine
lines, external does
not allow
different colored due to the fire.
4
．
When you
combine the various valves, a gasket in valve
placement
(Teflon)
by
hand,
screws,
bolts
in
diagonal
method
for
sequential
devices.
5
．
Combo valve
level so that in a straight line then screw the
bolts in
a open end wrench in a
diagonal manner.
5.
Specification for welding
Automatic welding:
5-1
．
Welded
pipe
subjected
to
cutting,
facing,
chamfering
process,
makes
the wall of workpiece
connected.
5-2
.
Welded pipes passing through the use of
0.01um
filtering of
Ar
, set
23
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flow (pressure) cyclic
blowing into the tube, and out of the air.
Note:
<1>Argon
gas
Purity
99
。
999%
over to use
<2>
In principle, using
liquefied
Argon gas
。
<3>
When
splicing
can
not
be
removed
when
you
are
replacing
the
oxide
film
Gas
。
5-3
．
Adjust the
spacing between a tungsten rod and welded
pipe.
Note:
<1>
When grinding tungsten
rods cannot be biased.
<2>
Serpentine
is
tungsten
and
weld
lianzhu
inquires,
and
you
want
to
wear.
Used
when grinding grinding machine.
<3>Taper
Angle please refer
to the record surface.
Welding
CAP
Shi,
Gap Gauge
Fix.
5-4
．
Adjusted
data and before and after the blow time
(explaining part
of data set, please
refer to the automatic welding machine)
Blowing time cannot be less than before
and after
10
Seconds.
5-5
．
Start the welder, observation of current and
voltage stability.
<1>
Tester
Confirm the voltage
<2> 220V
Occasion to confirm
the connection.
<3> 110V
Power, to protect the wiring shall be
used with leakage
Breaker
Socket.
<4>
Grounded wire welding
machines individual users.
5-6
．
Welding end,
adjust the internal assurance gas flow.
5-7
．
Check
whether the weld flaws.
5-8
．
Surface
cleaning
<1>
Physical cleaning: with
steel brush to remove surface oxide
<2>
Chemical cleaning: to
remove surface oxide electrolysis.
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5-9
．
Notes:
<1>
Offset
center point:
a.
Tungsten rods and welding
position offset
b.
Grinding of tungsten rods
angle
<2>
Weld
lianzhu is uneven:
a.
Cutting surface
90°
Not come out
b.
Cut,
protuberant
c.
Consumption of tungsten
rods
<3>
Inadequate melting: observation of weld
welding inside, adjust the
current
<4>
Melt-sinking: the gas pressure is not
controlled
<5>
Bead snake: welding too much
gas
5-10
．
Welding
machine arc causes:
<1>
Tungsten Rod gap size is
not suitable for
<2>
The arc current is too
small
<3>
Poor
conductivity of tungsten rods
<4>
Broken fuse
<5>
Welding machines, welding
fault appear
6. CHEMICAL
HOOK-UP
Construction
specifications
6-1
Project specification:
CHEMICAL HOOK-UP
Secondary
piping is done by installing the
VMB
Valve
boxes, outlet line and
the signal line, installed to use the machine's
entry port.
6-2
Materials and construction
standards:
1
．
Types of
chemicals (solvents):
C260
、
EKC-270
、
NMP
、
OK-73
、
A-515
、
IPA,
In addition
to
EKC-270
PFA/
304BA
Tube,
others use
316LEP
Tube, take
over the way with
VMB
Export
and machine forms over the entry port.
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2
．
Types of
chemicals (acids, bases):
HF1%
、
HF49%
、
H2O2
、
NH4OH29%
、
DEVELOPER
、
M1
、
BOE200:1
、
BOE500:1
、
BOE50:1
、
HNO3
、
HCL
、
H3PO4
、
H2SO4 PFA/CLEAR-PVC
Double
pipe
bend
directly, take over the way
with
VMB
Outlet and the
machine inlet-side
inner tube, direct
expansion tubes, safe to use
40A C-PVC
SOCKET
Fix.
3
．
Signal wire
installation:
<1>
Owners
of
0.5m/m2CABLE 50pin
、
PLAG
、
57-30500
Connectors,
plus
EMT
Tube protection,
cohesion
EJB
Box and the
machine entry port.
<2>
According to
CHEMICAL
Primary system design
requirements, complete
chemical
systems
signal
lines
wiring
and
signal
line
short
circuit
test,
determine
the
short-circuit
occurs,
after
filling
out
the
form,
and
start
recording.
6-3
Test
standard:
1
.
316L EP
pipes in
plumbing is
completed,
PN2
gas
pressure test
(
6kg/cm2
above,
24Hr
) after
the test is completed, put pipe name on label
and
VMB
Valve box
VCR
labeled fragile, the machine inlet
side of device service
link, and fill
in the test report, handed over to the owners that
sign.
2
.
PFA/CLEAR-PVC
pipeline due
to piping is completed,
PN2
gas pressure
test
(
3kg/cm2,4Hr
) after the test
is completed, put pipe name on label
and
VMB
valve box
joints, Affix a fragile, the machine inlet side of
device
service
link,
and
fill
in
the
test
report,
handed
over
to
the
owners
that sign.
3
. Signal cable
tests: short circuit test to be completed before
construction, completed a short circuit
test, after testing the machine
inlet
side
of
HOOK-UP
factory,
who
accompanied
the
devices
to
be
linked,
contact
changes,
fill
out
the
contact
change
form,
CHEMICAL
acids
primary
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supply system staff for
final confirmation,
EJB
Box
outlet, with a tubing
facility staff,
to be linked.
6-4
Systems for acid:
1
.
CHEMICAL HOOK-
UP
construction workers after
completing the piping
piping
shall
be
reconfirmed
VMB
Connector
is
loose,
machine
interface
is
driven
by
luxury-
level
staff
with
CHEMICAL HOOK-UP TEAM
staff
to
confirm
action.
2
. Electronically controlled
complete signal line, once after wiring,
plumbing
suppliers
and
machine
equipment
suppliers
must
complete
the
VMB
and
equipment leak leakage
SENSOR
test signal is functioning properly,
and
CHEMICAL
systems supplier, complete the device
end to
EJB
Box to
CHEMICAL
control systems,
testing its signal and the control valve is
functioning properly.
3
. For acid must be
completed before
CHECK LIST
Hou, after confirming the
points and signals are normal again,
handed over to officers to sign, by
HOOK-UP
construction workers
wear acid resistant clothing, accompanied
the equipment and facility staff to
open
VMB STICK
ends of
valve, acid
supply to the machine.
Test
specifications
1
.
Appearance inspection
2
. Line pressure testing of
gas tightness test
3
. Gas pipeline process
checks
4
.
He
leak check
5
. Analysis of micro-
particles
6
.
Analysis of micro-oxygenation
7
. Moisture
analysis
1.
Visual inspection:
Ultra high purity gases piping Assembly
is completed, Visual inspection
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of the pipeline
needs to be done, test items are:
1.
All
the
pipes
are
in
accordance
with
the
design
construction,
and
marked
gas
species.
2.
All
uses of materials with the material
provided.
3.
Pipe
welding angle, skew, distort it.
4.
Pipe dirt
residue.
5.
Pipelines are there dents,
cracks and other undesirable defects.
6.
Identify supporting
pipeline of stent placement and correct
7.
Determine pipe maintenance
work does not impede itself and the degree
of beauty
2.
Line pressure testing of gas tightness
test
1. 0.1um
Nitrogen gas or plant
filters
PN2
System pressure
test.
2.
Temporary pressure testing
of pressure and time of pressure needed
design values as shown in the
schedule.
Test
project
Provides
gas
pressure test
test time
Stress
testing
N2 10kg/cm2
(Or
prescribed by owners)
60
Minutes
3.
After
a
pipe
filled
with
the
required
pressure
of
gas,
check
all
joints
and
welded
parts,
and
leak
fluid
leak,
maintaining
a
certain
pressure
and
make
records.
4.
Records of anyone found to
be outliers.
5.
Record
using
the
pressure
gauge
reading
in
data,
pressure
drop
0.1Kg/cm2
It
is considered passed.
6.
Finish the temporary press
start gas-tight test after test. Test
pressure and time design
value
Test
project
Provides
gas
pressure test
test time
Stress
testing
N2 8Kg/cm2
(Or
prescribed by owners)
24
Hours
7.
When
tested
after
a
pipe
filled
with
test
gas
10
Minutes
or
more,
records
are only, in order to avoid errors.
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8.
Tightness
tests,
read
out
pressure
gauge
must
be
used
for
data
recording.
9.
At
a
given
pressure
and
keep
time,
pressure
pipeline
should
not
decline.
If the pressure
when
discrepancies in values, but tests
at the start and
finish of the room
temperature is different, you need to consider the
temperature
correction
formula,
this
stress
test
is
to
determine
whether
there is
approved.
Temperature
correction formula:
ε=*(P2
/T2
)÷(P1
/T1)+×100%
Test time
Measurement
conversion worth calculation
Pressure
(Kg/cm2G)
Temperature
(
℃
)
Pressure
(Kg/cm2A),
temperature
(
k
)
Start testing
p1 t1
P1=p1+1.033 T1=t1+273
End
test
p2 t2 P2=p2+1.033 T2=t2+273
If the test is complete, pressure gauge
readings to keep records at the
beginning of the
99%
Above, the test value is recognized as
a test.
Final pressure
value
=
End pressure
measurement
/
End
temperature
measurement
÷
Begins measuring pressure
/
Begins measuring
temperature
X100
—
99%
10.
Does not accept pressure
test parts, such as safety valves, control
valves, pressure gauges and other, are
subject to air tightness test.
Tightness test pressure exceeds the
maximum permissible operating
pressure
of the component at risk.
Notes:
<1>
Seal
vent:
pipeline
along
inlet,
the
rest
in
and
out
ports
are
blocked.
<2>
Convergence lines: side
pipe air inlet origin, outlet hoses
Gauge
Tester or disc, form a closed
space.
<3>
Fill
the gas intake or outlet
Gauge
Or disc Tester test gases must be
subjected
0.01um
Filtering of inert gas (nitrogen or
liquid nitrogen).
Side of the pipeline
all valves must be fully open.
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<4>
Improvement
measures where there is leakage repairs and
improvements
of heavy
industry.
<5>Snoop
Test:
Snoop
Test
every
weld
on
the
side
tube
and
fittings,
whether
there is leakage phenomenon. (If there
are any leaks, there will be a
blistering conditions).
<6>Gauge
Return to
zero:
Gauge
To use zero
movement.
<7>
Test:
Gauge
Recorder
or
disc
pressure,
pipeline
pressure
conditions
to
test the disk, and the
passage of time, record every moment in real time
the pressure value.
Testing time: gas-using
equipment:
8
Hours
Specialty
gas equipment:
24
Hours
Or in
accordance with owner's requirement of test
time.
Test temperature:
maintaining as far as possible to start testing
temperature (dust-free room
temperature
23±°
C
) To the test result (due
to
temperature affects the pressure test equipment).
<8>
The end
of
/
Notes: test results
need to be recorded is the voltage
transient test record sheet.
3.
Gas pipeline
process checks
1.
Will all end of the gas
line valve to open
2.
Close the test end of the
gas line valve
3.
Gas
line
to
be
measured
to
N2
Pressurized
to
a
certain
pressure,
and
watch
for five minutes,
observe the pressure gauge is reduced.
4.
If the pressure gauge is
no reduction, which represents the piping is
connected properly. If there is no drop
in the open end of the gas line
valve
to be tested and determine whether the pressure
gauge will drop to
zero, if reduced to
zero for pressure gauges, no problem.
1
．
Vertical and horizontal tests
pass
Support Gasket:
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a.
Distribution
pipe
is
vertical
and
horizontal
distortion-free?
By
Visual
inspection
b.
Weld bead is clean and
free of holes, sand hole? By Visual
inspection
c
.
Support
whether or not
according to regulations set up a solid?
t&Panel
Brackets,
hose clamps, screws, install the
appropriate?
Is
properly seated (no reuse
Gasket
)?
2
．
Pipe
flow:
a
．
Pipe
entrance
gases
in
the
disk
(source)
connected
to
the
gas
source,
the
machine end of pipe, connect the pressure
gauge.
b.
Aspirated test line is
correct,
Gauge
(Pressure
gauge) pressure.
c.
Rehabilitation pipes,
check whether the label is correct.
d.
Side pipes measuring,
check by tube, to avoid confusion.
e.
When
performing
a
check
case
of
incompatible
matters,
quality
assurance
personnel
should
inform
the
Engineering
Department
to
improve
supervision.
f.
When
poor
construction
quality
is
in
serious
condition,
shall
be
reported
to
the person in charge.
g.
Pipe flow survey, record
completed in piping
QA
Inspection table.
3.
The end of
/
Records:
a.
Make two copies of test
reports, owners signed copy filed in the
companies.
4.
He
Leak testing
4-1
Test procedure
<1>
Equipment
vacuum: first
He
Internal
vacuum leak detector
equipment
1*/sec
<2>
Convergence lines: will
be sealed up the test pipe all incoming and
outgoing ports, leaving only a breath
test pipe holes, convergence with
the
helium leak detector equipment.
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<3>
Vacuum:
vacuum piping, the disk number of the test must be
met
1*/sec,
And
numerical stability can be tested only after the
action.
<4>
Inspection lines: check
each solder joint of pipe, on the side
VCR
Connectors are assembled.
<5>
Testing:
using helium gas pipe, on the side of the gun to
test each
solder joint and
VCR
Joint monitoring of the helium leak
detector values
are displayed on the
control panel. Testing the numerical
specifications:
1*/sec
.
<6>
The end of
/
Notes: test results on the value
recorded in the helium
leak test record
sheet.
4-2
Helium leak detector operation
Note:
<1>
Native
to boot, should be placed steady, not
italic.
<2>
Native
internal
pumping
system
with
special
Turbo-molecular
pumps,
so
the
boot must be heard
Vent
Voice, or
3-5
Minutes later, the
Turbo
Pump
Stopped before it can be moved or
reboot.
<3>
The
operating voltage is divided into
110V&220V
In front of the
transmission, must determine whether
the voltage is correct.
<4>
This machine is a
precision electronic instrument and equipment, so
you must use a grounding-type
plug
<5>
Long-term
machinery
and
equipment
when
not
in
use,
must
start
running
one hour a week can
keep the machines more sensitive
<6>
Boot process:
a.
Press
the
power
switch
on
the
control
panel
display
when
the
system
INIT
0,1,2,3
Program,
and
can
be
observed
from
the
control
panel
Turbo Pump
RPM.
b.
About
3
Minutes,
Turbo Pump
Reaches top speed
,Rc 160
Vent
Light is the
helium
leak detector is ready is complete.
c. Vent
After the lights, in
the tester leakage rate can be seen displayed
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on
the
Control
Panel,
at
this
point
is
just
to
boot,
there
is
still
residual
gas inside the
machine, vacuum value inside the
1*/sec,
After
waiting for
the leakage rate is numerically stable, pipes,
side of the
connection you want to
test.
Test
procedure:
a.
Switch on: turn the power switch
to
b. INIT
0,1,2,3
:
VENT
Light
3
Minute-
by-
PUMP
Keys
c. PUMP
Key: numerical
stability after leak testing
d.
Linking device
test
<7>
Shut down
procedure:
a.
Turn off the main power before, leak
detector must be pressed to
Vent
Office,
Vent
Lights only after shutting down.
b.
After
shutdown due to internal
Turbo Pump
Still running, you must wait
3-5
Minutes to move.
c.
Test port
should be sealed after shutdown in order to
maintain
cleanliness within the leak
detector.
<8>
Notes:
Better to keep the leak detector
sensitivity, after the end of the test,
Interior contain large amounts of
helium in piping the side after the
separation of internal vacuum leak
detector must be numeric
1*/sec
Numerical stability
can be shut down after leak rate.
5.
Analysis of micro-
particles
5-1
Test procedure:
1.
Selection of
gas:
a.
Gas must
go through
0.01um
Filter of
an inert gas (nitrogen or liquid
nitrogen)
33