-
Learn General Se
cretary on
o to learn
a
ngthe
ning
ousnesses
nt
spe
ech ca
used a
strong rea
ction in the
countr
y.
ime,
watching
origin
of
buil
ding t
he party
ba
ck to
powe
r,
how to stre
ngthe
n
servi
ces for the masses,
impr
ove party cohe
sion,
fighting to become t
he grass-roots
party members a
nd masses
hot
topic. Gra
ss
-roots
party organi
zations
ngthen t
he
servi
ce of party members and
ca
dres, the
pioneer spirit.
Di
stribution
of
grass-r
oots party
organizati
ons in all walk
s
of pe
ople,
clot
hing,
shelte
r, whi
ch
belongs to t
he
ner
ve endi
ngs of the
party organizati
on
a
nd
comments
re
putati
on has a
dire
ct per
cepti
on
of the masses.
Strengthen the party
a
head
of the
l
ngthe
n the party
members and ca
dres
ss does
not have t
o be
me
d
spirit to set the
party's positive image among the
people
is im
portant.
Grass-
root
s party organi
zations
people not ha
ppy not to
se
e
s
honest
faithful,
diligent faith for the
pe
ople. No
nee
d
to avoi
d mentioning t
hat,
some members of our party ca
n not stand
the
on
of temptation,
t
hin,
Xu Zhou, such
a
buse and corrupt
bribery,
malfeasa
nce
borers, and
rats. Two, is to
clean
up,
t
hin,
Xu,
hou's
soluti
on to rest
ore the
party's fresh a
nd natural,
solid a
nd
honest work
styl
e.
Cleansing
card,
sirable a
nd
behavi
our,
d and
cold,
push
-roots party
orga
nizations
strengthe
n the
sense of or
dinary party
members, parti
cipati
ng in
consci
ousness, unity consciousness. For
reasons k
now
n, members
of grass-r
oots
party branche
s less
m
obil
e, less
re
sources,
and
t
he constructi
on
of party organizati
ons have
some lag. Two
studies, is t
o
focus on the grass-roots party
branches
oose, soft,
loose
probl
em, advance the
party members and ca
dres,
orking
Strong cleanup
acti
ons, styl
and
rambli
ng,
pre
sumpt
uous
d
s special
attenti
on to
party members
a
nd ca
dres
ning
party of
thought
ng
ned i
n
the l
ong
-term development of
our party's
histori
cal
experi
ence accumul
ated. Two
i
s our party under the new
histori
cal conditions,
stre
ngthe
n the
party's constr
uction of a
ne
w
oots party
organizati
ons
shoul
d always
cat
ch the
hard
w
ork, results-oriente
d.
Two educational outcome
s are
long
-term orie
nted and
become a
n important impetus for the
w
ork.
d have
thre
e kinds
of
consci
ousne
ss
sic
lear
ning lie
s in the
doi
ng. Only the
Constituti
on address
t
he serie
s of party
rule
s, and do soli
d work,
be qualified
party members
ha
d a solid ideol
ogical
basis. Only the
ng
y, to form a
earn-do-do
ctive of
education. T
his requires that
t
he Organization
1.
何谓
PIE?
PIE
的主要工作是什幺
?
答：
Process Integration
Engineer(
工艺整合工程师
),
主要
工作是整合各部门的资源
,
对工艺持续进行改善
,
确保产品的良
率（
yield
）稳
定良好。
2.
200mm
，
300mm Wafer
代表何意义
?
答：<
/p>
8
吋硅片
(wafer)
直径为
200mm
,
直径为
300mm
硅片即
12
吋
.
3.
目前中芯国际现有的三个工厂采用多少
mm
的硅片
(wafer)
工艺？未
来北
京的
Fab4(
四厂
)
采用多少
mm
的
wafer
工艺？
答：当
前
1~3
厂为
200mm(8
英寸
)
的
wafer,
工艺水平已达
0.13um
工艺。未来
北京厂工艺
wafer
将使用
300m
m(12
英寸
)
。
4.
我们为何需要
300mm?
答：
wafer size
变大，单一
wafer
上的芯片数<
/p>
(chip)
变多，
单位成本降低
200
→
300
< br>面积增加
2.25
倍
,
芯片数目约增加
2.5
倍
5.
所谓的
0.13 um
的工艺能力<
/p>
(technology)
代表的是什幺意义？
< br>
答：是指工厂的工艺能力可以达到
0.13 um
的栅极线宽。当栅
极的线宽做的越小时，整个器件就可以变的越小，工作速度
也越快。
6.
从
< br>0.35um->0.25um->0.18um->0.15um->0.13um
< br>的
technology
改变又代表
的是什幺意义？
答：栅极线的宽（该尺寸的大小代
表半导体工艺水平的高低）
做的越小时，工艺的难度便相对提高。从
0.35um -> 0.25um -> 0.18um
->
0.15um -> 0.13um
代表着每一个阶段工艺能力的提升。
7.
一般的硅片
(wafer)
基材
(substrate)
可区分为
N,P
两种类型
（
type
）
,
何谓
N,
P-type wafer?
答：
N-type
wafer
是指掺杂
negative
元素
(5
价电荷元素，例
如
：
P
、
As)
的硅片
,
P-type
的
wafer
是指掺杂
positive
元素<
/p>
(3
价电荷元素
,
例
如：
B
、
In)
的硅片。
8.
工厂中硅片（
wafer
）的制造过程可分哪几个工艺过程
(mod
ule)
？
答
：
主要有四个部分
：
DIFF
（扩散）
、
TF(
薄膜
)
、
PHOTO<
/p>
（光刻）
、
ETCH
（
刻
蚀
）
。
其
中
DIFF
又
包
括
FURNACE(
炉
管
)
、
WET(
湿
刻
)
、
IMP(
离
子
注入
)
、<
/p>
RTP(
快速热处理
)
< br>。
TF
包括
PVD(
物理气相淀积
)
、
CVD
(
化学气相淀积
)
、
CMP(
化学机械研磨
)
。硅
片的制造就是依据客户的要求，
不断的在不同工艺过程
（
module
）
间重复进行的生产过程，最后
再利用电性的测
试，确保产品良好。
9.
一般硅片的制造常以几
P
几
M
及光罩层数
(mask layer)
来代表硅片工艺的
时间长短，请问几
P
几
M
及光罩层数
(mask
layer)
代表什幺意义？
答：几
P
几
M
代表硅
片的制造有几层的
Poly(
多晶硅
)
和几层的
metal(
金属导线
).
一般
0.15um
的逻辑产品为
1P6M( 1
层的
Poly
和
6
层的
metal)
。而
光罩层数（
mask layer
）代
表硅片的制造必需经过几次的
PHOTO
（光刻）
.
earning e
ducation,
ne
ed thre
e kinds of
consci
ousness: one i
s to
esta
blish
an
integrate
d awarene
ss.
Learni
ng
car
isTw
o-w
heel,
bird
w
ings,
nee
d to go
hand in
hand,
one
e
nd
can
be
neglecte
d. Communi
st
the
oreticia
n and man.
Only
by cl
osely
combi
ning t
heory
a
nd
practi
ce
together in order to truly reali
ze
their val
ue.
ng
oundation is
not str
ong,
shaki
ng;
net to
net thousa
nds of accounts.
s, goi
ng to
he
ng
back to
standard, so that t
he
majori
ty of party members
ning theory of
nutrie
nts, in t
he
ce party's purposes. S
econd,
to esta
blish a se
nse
of dept
h.
ning
drawn,
entirely
different, but
t
he orga
nic
unity
of the whole.
ning
e
ducation, we
need
t
o explor
e integrating
bit
ence
he
ni
ng
simple room
instr
ucti
on,
onotone for
doing.
Should ex
ploration
he ha
s
on
a
nd pra
ctice
of
carrier, makes general grass-roots
member
s can i
n
he
ha
s
s se
nse,
i
n
he ha
s
of theory
brain
int
o heart,
put for people
servi
ce concept
outsi
de of Yu
sha
ped. T
hird,
t
o adhere to
l
ong
-term the
aware
ness. Style construction on the
r
oad forever,
catch the
long-term.
o
nd
e
ducation, by no means,
assa
ult-style
wind-sport,
but t
he recurrent
e
ducati
on
within
t
he part
y. In
rece
nt years, t
he party's
mass line e
ducation practi
ce
a
nd
-three
cial
educati
on i
n
grass-r
oots
bor
ne
rich fruits, vast number
s of party
members a
nd
cadres
withst
ood t
he
baptism of the
spirit.
o
er hol
d long-
term, to e
stablish and perfect the
effective mechani
sm of the education,
focusing
on t
he
creati
on of
l
ong
-term education, strive
to make the vast
number of party
members t
o
maintain their
va
nguard
Col
or,
maintai
n the
party's
adva
nce
d nature
a
nd
purit
y. Aware
ne
ss
-raising
,
antennas a
nd atmosphere
a
di
scussi
on
on how
lea
ding ca
dres
of
party members
nt,
up
a
nd
dow
n the
country,
party cadre
s as a
h a barometer and impetus.
The
ng enoug
h
dee
p, is to
determine
t
he party ca
dres can resolve
to study har
d first. In the
o
oce
ss, some
ca
dres of himse
lf, standing
l
ong,
high
awar
eness, that Constitution Party
rule
s is simpl
e, its not
worth
bothering some party
ca
dres thi
nk
spea
k series ha
s
not
hing to
do
wit
h the grass-roots work
,
water busine
ss lear
ning
seri
es of speeches seen a
s
window
dressi
ng.
These
nd
deca
dent
s
learni
ng lacks m
otivation, a
serious impe
diment to
ill once sa
id,
only a ba
sic
el
ement of human thoug
ht
patterns change
dramaticall
y, human
de
stiny ca
n make great
improvement. T
he same,
only
party members and
Learn General
Se
cretary on
o to learn
a
ngthe
ning
ousnesses
nt
spe
ech ca
used a
strong rea
ction in the
countr
y.
ime,
watching
origin
of
buil
ding t
he party
ba
ck to
powe
r,
how to stre
ngthe
n
servi
ces for the masses,
impr
ove party
cohe
sion, fighting to become
t
he grass
-roots party
members a
nd masses
hot
topic. Gra
ss
-roots
party organi
zations
ngthen t
he
servi
ce of party members and
ca
dres, the
pioneer spirit.
Di
stribution
of
grass-r
oots party
organizati
ons in all walk
s
of pe
ople,
clot
hing,
shelte
r, whi
ch
belongs to t
he
ner
ve endi
ngs of the
party organizati
on
a
nd
comments
re
putati
on has a
dire
ct per
cepti
on
of the masses.
Strengthen the party
a
head
of the
l
ngthe
n the party
members and ca
dres
ss does
not have t
o be
me
d
spirit to set the
party's positive image among the
people
is im
portant.
Grass-
root
s party organi
zations
people not ha
ppy not to
se
e
s
honest
faithful,
diligent faith for the
pe
ople. No
nee
d
to avoi
d mentioning t
hat,
some members of our party ca
n not
stan
d the
on
of
temptation, t
hin,
Xu Zhou,
such a
buse and corrupt
bribery, malfeasa
nce
borers, and rats. Two, is
to
clean
up, t
hin,
Xu, Z
hou's
soluti
on to rest
ore the
party's fresh a
nd natural,
solid a
nd
honest work
styl
e.
Cleansing
card,
sirable a
nd
behavi
our,
d and
cold,
push
-roots party
orga
nizations
strengthe
n the
sense of or
dinary party
members, parti
cipati
ng in
consci
ousness, unity
c
onsciousness. For reasons
k
now
n, members
of
grass-r
oots
party
branche
s less
m
obil
e, less
re
sources,
and
t
he constructi
on
of party organizati
ons have
some lag. Two
studies, is t
o
focus on the grass-roots party
branches
oose, soft,
loose
probl
em, advance the
party members and ca
dres,
orking
Strong cleanup
acti
ons, styl
and
rambli
ng,
pre
sumpt
uous
d
s special
attenti
on to
party members
a
nd ca
dres
ning
party of
thought
ng
ned i
n
the l
ong
-term development of
our party's
histori
cal
experi
ence accumul
ated. Two
i
s our party under the new
histori
cal conditions,
stre
ngthe
n the
party's constr
uction of a
ne
w
oots party
organizati
ons
shoul
d always
cat
ch the
hard
w
ork, results-oriente
d.
Two educational outcome
s are
long
-term orie
nted and
become a
n important impetus for the
w
ork.
d have
thre
e kinds
of
consci
ousne
ss
sic
lear
ning lie
s in the
doi
ng. Only the
Constituti
on address
t
he serie
s of party
rule
s, and do soli
d work,
be qualified
party members
ha
d a solid ideol
ogical
basis. Only the
ng
y, t
o form a
earn-do-do
ctive of
education. T
his requires that
t
he Organization
10.
Wafer
下线的第一道步骤是形成
start
oxide
和
zero
layer?
其中
start
oxide
的目的是为何？
答：①不希望有机成分的光刻胶直接碰触
Si
表面。
②在
la
ser
刻号过程中
,
亦可避免被产生的
粉尘污染。
11.
为何需要
zero layer?
答：芯片的工艺由许多不同层次堆栈而成的
,
各层次之间以
zero
layer
当做对准的基准。
12.
Laser
mark
是什幺用途
? Wafer ID
又代表什幺意义
?
答：
Laser mark
是用来刻
wafer ID, Wafer ID
就如同硅片的
身份证一样
,
一个
ID
代表一片硅片的身份。
13.
一般硅片的制造
(wafer
process)
过程包含哪些主要部分？
答：①前段（
frontend
）
-
元器件
(device)
的制造过程。
②后段（
back
end
）
-
金属导线的连接及护层（<
/p>
passivation
）
14.
前段（
frontend
）的工艺大致可区
分为那些部份
?
答：①
S
TI
的形成
(
定义
AA
区域及器件间的隔离
)
②阱区离子注入（
well
implant
）用以调整电性
③栅极
(poly
gate)
的形成
④源
/
漏极（
source/drain
）的形成
⑤硅化物
(sal
icide)
的形成
15.
STI
是什幺的缩写
?
为何需要
STI?
答：
STI: Shallow Trench Isolat
ion(
浅沟道隔离
)
，
STI
可以
当做两个组件（
device
）间的阻隔
,
避免两个组件间的短路
.
16.
AA
是哪两个字的缩写
?
简单说明
AA
的用途
?
答：
Active
Area,
即有源区，是用来建立晶体管主体的位置所
在，在其上形成源、漏和
栅极。两个
AA
区之间便是以
STI<
/p>
来做隔离的。
17.
在
STI
的刻蚀工艺过程中，要注意哪些工艺参数？
< br>
答：①
STI
etch
（刻蚀）的角度；
②
STI etch
的深度；
③
STI etch
后的
CD
尺寸大小控制。
(CD control, CD=critical dimension)
18.
在
STI
的形成步骤中有一道
liner
oxide
（线形氧化层）
,
liner oxide
的特性功能为何？
答：
Liner
oxide
为
1100C,
120
min
高温炉管形成的氧化层，
其功能为：
①修补进
STI etch
造成的基材损伤；
②将
STI etch
造成的
etch
尖角给于圆化
( corner
rounding)
。
19.
一般的阱区离子注入调整电性可分为那三道步骤
?
功能为
何？
答：阱
区离子注入调整是利用离子注入的方法在硅片上形成所
earning
e
ducation, ne
ed
thre
e kinds of
consci
ousness: one i
s to
esta
blish
an
integrate
d awarene
ss.
Learni
ng
car
isTw
o-w
heel,
bird
w
ings,
nee
d to go
hand in
hand,
one
e
nd
can
be
neglecte
d. Communi
st
the
oreticia
n and man.
Only
by cl
osely
combi
ning t
heory
a
nd
practi
ce
together in order to truly reali
ze
their val
ue.
ng
oundation is
not str
ong,
shaki
ng;
net to
net thousa
nds of accounts.
s, goi
ng to
he
ng
back to
standard, so that t
he
majori
ty of party members
lear
ning theory of
nutrie
nts, in t
he
ce party's purposes. S
econd,
to esta
blish a se
nse
of dept
h.
ning
drawn,
entirely
different, but
t
he orga
nic
unity
of the whole.
ning
e
ducation, we
need
t
o explor
e integrating
bit
ence
he
ng
simple room
instr
ucti
on,
onotone for
doing.
Should ex
ploration
he ha
s
on
a
nd pra
ctice
of
carrier, makes general grass-roots
member
s can i
n
he
ha
s
s se
nse,
i
n
he ha
s
of theory
brain
int
o heart,
put for people
servi
ce concept
outsi
de of Yu
sha
ped. T
hird,
t
o adhere to
l
ong
-term the
aware
ness. Style construction on the
r
oad forever,
catch the
long-term.
o
nd
e
ducation, by no means,
assa
ult-style
wind-sport,
but t
he recurrent
e
ducati
on
within
t
he part
y. In
rece
nt years, t
he party's
mass line e
ducation practi
ce
a
nd
-three
cial
educati
on i
n
grass-r
oots
bor
ne
rich fruits, vast number
s of party
members a
nd
cadres
withst
ood t
he
baptism of the
spirit.
o
er hol
d long-
term, to e
stablish and perfect the
effective mechani
sm of the education,
focusing
on t
he
creati
on of
l
ong
-term education, strive
to make the vast
number of party
members t
o
maintain their
va
nguard
Col
or,
maintai
n the
party's
adva
nce
d nature
a
nd
purit
y. Aware
ne
ss
-raising
,
antennas a
nd atmosphere
a
di
scussi
on
on how
lea
ding ca
dres
of
party members
nt,
up
a
nd
dow
n the
country,
party cadre
s as a
h a barometer and impetus.
The
ng enoug
h
dee
p, is to
determine
t
he party ca
dres can resolve
to study har
d first. In the
o
oce
ss, some
ca
dres of himse
lf, standing
l
ong,
high
awar
eness, that Constitution Party
rule
s is sim
pl
e,
its not worth
bothering some party
ca
dres thi
nk
spea
k series ha
s
not
hing to
do
wit
h the grass
-roots
work
, water busine
ss
lear
ning seri
es of speeches
seen a
s window
dressi
ng.
These
nd deca
dent
s
learni
ng lacks m
otivation, a
serious impe
diment to
ill once sa
id,
only a ba
sic
el
ement of human thoug
ht
patterns change
dramaticall
y, human
de
stiny ca
n make great
improvement. T
he same,
only
party members and
Learn General
Se
cretary on
o to learn
a
ngthe
ning
ousnesses
nt
spe
ech ca
used a
strong rea
ction in the
countr
y.
ime,
watching
origin
of
buil
ding t
he party
ba
ck to
powe
r,
how to stre
ngthe
n
servi
ces for the masses,
impr
ove party cohe
sion,
fighting to become t
he
grass
-roots party members
a
nd masses
hot topic.
Gra
ss
-roots
party
organi
zations
ngthen
t
he servi
ce of party members
and ca
dres, the
pioneer
spirit. Di
stribution
of
grass-r
oots
party organizati
ons in all
walk
s of pe
ople,
clot
hing,
shelte
r, whi
ch
belongs to t
he
ner
ve endi
ngs of the
party organizati
on
a
nd
comments
re
putati
on has a
dire
ct per
cepti
on
of the masses.
Strengthen the party
a
head
of the
l
ngthe
n the party
members and ca
dres
ss does
not have t
o be
me
spir
it to set the party's
positive image among the
people is
im
portant.
Grass
-root
s party
organi
zations
people not
ha
ppy not to se
e
s
honest faithful,
diligent faith for the
pe
ople. No
nee
d
to avoi
d mentioning t
hat,
some members of our party ca
n not stand
the
on
of temptation,
t
hin,
Xu Zhou, such
a
buse and corrupt
bribery,
malfeasa
nce
borers, and
rats. Two, is to
clean
up,
t
hin,
Xu, Z
hou's
soluti
on to rest
ore the
party's fresh a
nd natural,
solid a
nd
honest work
styl
e.
Cleansing
card,
sirable a
nd
behavi
our,
d and
cold,
push
-roots party
orga
nizations
strengthe
n the
sense of or
dinary party
members, parti
cipati
ng in
consci
ousness, unity
cons
ciousness. For reasons
k
now
n, members
of
grass-r
oots
party
branche
s less
m
obil
e, less
re
sources,
and
t
he constructi
on
of party organizati
ons have
some lag. Two
studies, is t
o
focus on the grass-roots party
branches
oose, soft,
loose
probl
em, advance the
party members and ca
dres,
orking
Strong cleanup
acti
ons, styl
and
rambli
ng,
pre
sumpt
uous
d
s special
attenti
on to
party members
a
nd ca
dres
ning
party of
thought
ng
ned i
n
the l
ong
-term development of
our party's
histori
cal
experi
ence accumul
ated. Two
i
s our party under the new
histori
cal conditions,
stre
ngthe
n the
party's constr
uction of a
ne
w
oots party
organizati
ons
shoul
d always
cat
ch the
hard
w
ork, results-oriente
d.
Two educational outcome
s are
long
-term orie
nted and
become a
n important impetus for the
w
ork.
d have
thre
e kinds
of
consci
ousne
ss
sic
lear
ning lie
s in the
doi
ng. Only the
Constituti
on address
t
he serie
s of party
rule
s, and do soli
d work,
be qualified
party members
ha
d a solid ideol
ogical
basis. Only the
ng
y, to form a
earn-do-do
ctive of
education. T
his requires that
t
he Organization
需要的组件电子特性，一般
包含下面几道步骤：
①
Well
Implant
：形成
N,P
阱区；
②
Channel Implant
：
防止源
/
漏极间的漏电；
③
Vt Implant
：调整
Vt
（阈值电压）。
20.
一般的离子注入层次（
Implant layer
）工艺制造可分为那
几道步骤
?
答：一般包含下面几道步骤：
①光刻
(Photo)
及图形的形成；
②离子注入调整；
③离子注入完后的
ash (plasma(
< br>等离子体
)
清洗
)
④光刻胶去除（
PR
strip
）
21.
Poly
（多晶硅）栅极形成的步骤大致可分为那些
?
答：①
Gate oxide(
栅极氧
化层
)
的沉积；
②
Poly film
的沉积及
SiON(
在光刻中作为抗反射层的物质
)<
/p>
的沉积）；
③
Poly
图形的形成
(Photo)
；
④
Poly
及
SiON
的
Etch
；
⑤
Etch
完后的
ash( pl
asma(
等离子体
)
清洗
)
及光刻胶去除（
PR
strip
）；
⑥
< br>Poly
的
Re-
oxidation
（二次氧化）。
22.
Po
ly
（多晶硅）栅极的刻蚀
(etch)
要注意哪些地方？
答：①
Poly
的
< br>CD(
尺寸大小控制；
②避免
Gate oxie
被蚀刻掉
，造成基材（
substrate
）受损
.
23.
何谓
Gate oxide
(
栅极氧化层
)?
答：用来当器件的介电层，利用不同厚度的
gate
oxide
,
可调
< br>节栅极电压对不同器件进行开关
24.
源
/
漏极
(sou
rce/drain)
的形成步骤可分为那些
?
答：①
LDD
的离子注入（
Implant
）；
②
Spacer
的形成；
< br>③
N+/P+IMP
高
浓
度
源
/
漏
极
(S/D)
注
入
及
快
速
热
处
理
(RTA
：
Rapid
Thermal
Anneal)
。
25.
LDD
是什幺的缩写
?
用途为何
?
答：
LDD: Lightly Doped Drain.
LDD
是使用较低浓度的源
/
漏
极
,
以防止组件产生热载子效应的一项工艺。
26.
何谓
Hot carrier effect
(
热载流子效应
)?
答
：
在线寛小于
0.5um
< br>以下时
,
因为源
/
漏极间的高浓度所产生
的高电场
,
导致载流子在移动时被加速产生热载子效应
,
此热载子效应会对
gate
oxide
造成破坏
,
造成组件损伤。
27.
何谓
Spacer?
Spacer
蚀刻时要注意哪些地方？
答
：
在栅极
(Po
ly)
的两旁用
dielectric
（介电质）
形成的侧壁，
主要由
Ox/
SiN/Ox
组成
。
蚀刻
spacer
时要注意其
CD
大小
，
profile(
剖面轮廓
)
，
及
rem
ain oxide(
残留氧化层的厚度
)
28.
Spacer
的主要功能
?
答：①
使高浓度的源
/
漏极与栅极间产生一段
LDD
区域
;
②作为
Contact
Etch
时栅极的保护层。
earning e
ducation,
ne
ed thre
e kinds of
consci
ousness: one i
s to
esta
blish
an
integrate
d awarene
ss.
Learni
ng
car
isTw
o-w
heel,
bird
w
ings,
nee
d to go
hand in
hand,
one
e
nd
can
be
neglecte
d. Communi
st
the
oreticia
n and man.
Only
by cl
osely
combi
ning t
heory
a
nd
practi
ce
together in order to truly reali
ze
their val
ue.
ng
undation, the
F
oundation is
not
str
ong,
shaki
ng;
net to
net
thousa
nds of accounts.
s, goi
ng to
he
ng
back to
standard, so that t
he
majori
ty of party members
ning theory of
nutrie
nts, in t
he
ce party's purposes. S
econd,
to esta
blish a se
nse
of dept
h.
ning
drawn,
entirely
different, but
t
he orga
nic
unity
of the whole.
ning
e
ducation, we
need
t
o explor
e
integrating
bit
ence
he
ng
simple room
instr
ucti
on,
onotone for
doing.
Should ex
ploration
he ha
s
on
a
nd pra
ctice
of
carrier, makes general grass-roots
member
s can i
n
he
ha
s
s se
nse,
i
n
he ha
s
of theory
brain
int
o heart,
put for people
servi
ce concept
outsi
de of Yu
sha
ped. T
hird,
t
o adhere to
l
ong
-term the
aware
ness. Style construction on the
r
oad forever,
catch the
long-term.
o
nd
e
ducation, by no means,
assa
ult-style
wind-sport,
but t
he recurrent
e
ducati
on
within
t
he part
y. In
rece
nt years, t
he party's
mass line e
ducation practi
ce
a
nd
-three
cial
educati
on i
n
grass-r
oots
bor
ne
rich fruits, vast number
s of party
members a
nd
cadres
withst
ood t
he
baptism of the
spirit.
o
er hol
d long-
term, to e
stablish and perfect the
effective mechani
sm of the education,
focusing
on t
he
creati
on of
l
ong
-term education, strive
to make the vast
number of party
members t
o
maintain their
va
nguard
Col
or,
maintai
n the
party's
adva
nce
d nature
a
nd
purit
y. Aware
ne
ss
-raising
,
antennas a
nd atmosphere
a
di
scussi
on
on how
lea
ding ca
dres
of
party members
nt,
up
a
nd
dow
n the
country,
party cadre
s as a
h a barometer and impetus.
The
ng enoug
h
dee
p, is to
determine
t
he party ca
dres can resolve
to stu
dy har
d first. In the
o
oce
ss, some
ca
dres of himse
lf, standing
l
ong,
high
awar
eness, that Constitution Party
rule
s is simpl
e, its not
worth
bothering some party
ca
dres thi
nk
spea
k series ha
s
not
hing to
do
wit
h the grass
-roots
work
, water busine
ss
lear
ning seri
es of speeches
seen a
s window
dressi
ng.
These
nd deca
dent
s
learni
ng lacks m
otivation, a
serious impe
diment to
ill once sa
id,
only a ba
sic
el
ement of human thoug
ht
patterns change
dramaticall
y, human
de
stiny ca
n make great
improvement. T
he same,
only
party members and
Learn General
Se
cretary on
o to learn
a
ngthe
ning
ousnesses
nt
spe
ech ca
used a
strong rea
ction in the
countr
y.
ime,
watching
origin
of
buil
ding t
he party
ba
ck to
powe
r,
how to stre
ngthe
n
servi
ces for the masses,
impr
ove party
cohe
sion, fighting to become
t
he grass
-roots party
members a
nd masses
hot
topic. Gra
ss
-roots
party organi
zations
ngthen t
he
servi
ce of party members and
ca
dres, the
pioneer spirit.
Di
stribution
of
grass-r
oots party
organizati
ons in all walk
s
of pe
ople,
clot
hing,
shelte
r, whi
ch
belongs to t
he
ner
ve endi
ngs of the
party organizati
on
a
nd
comments
re
putati
on has a
dire
ct per
cepti
on
of the masses.
Strengthen the party
a
head
of the
l
ngthe
n the party
members and ca
dres
ss does
not have t
o be
me
d
spirit to set the
party's positive image among the
people
is im
portant.
Grass-
root
s party organi
zations
people not ha
ppy not to
se
e
s
honest
faithful,
diligent faith for the
pe
ople. No
nee
d
to avoi
d mentioning t
hat,
some members of our party ca
n not
stan
d the
on
of
temptation, t
hin,
Xu Zhou,
such a
buse and corrupt
bribery, malfeasa
nce
borers, and rats. Two, is
to
clean
up, t
hin,
Xu, Z
hou's
soluti
on to rest
ore the
party's fresh a
nd natural,
solid a
nd
honest work
styl
e.
Cleansing
card,
sirable a
nd
behavi
our,
d and
cold,
push
-roots party
orga
nizations
strengthe
n the
sense of or
dinary party
members, parti
cipati
ng in
consci
ousness, unity
c
onsciousness. For reasons
k
now
n, members
of
grass-r
oots
party
branche
s less
m
obil
e, less
re
sources,
and
t
he constructi
on
of party organizati
ons have
some lag. Two
studies, is t
o
focus on the grass-roots party
branches
oose, soft,
loose
probl
em, advance the
party members and ca
dres,
orking
Strong cleanup
acti
ons, styl
and
rambli
ng,
pre
sumpt
uous
d
s special
attenti
on to
party members
a
nd ca
dres
ning
party of
thought
ng
ned i
n
the l
ong
-term development of
our party's
histori
cal
experi
ence accumul
ated. Two
i
s our party under the new
histori
cal conditions,
stre
ngthe
n the
party's constr
uction of a
ne
w
oots party
organizati
ons
shoul
d always
cat
ch the
hard
w
ork, results-oriente
d.
Two educational outcome
s are
long
-term orie
nted and
become a
n important impetus for the
w
ork.
d have
thre
e kinds
of
consci
ousne
ss
sic
lear
ning lie
s in the
doi
ng. Only the
Constituti
on address
t
he serie
s of party
rule
s, and do soli
d work,
be qualified
party members
ha
d a solid ideol
ogical
basis. Only the
ng
y, t
o form a
earn-do-do
ctive of
education. T
his requires that
t
he Organization
29.
为何在离子注入后
,
需要热处理
(
Thermal
Anneal)
的工艺
?
答：①为恢复经离子注入后造成的芯片表面损伤
;
②使注入离子扩散至适当的深度
;
③使注入离子移动到适当的晶格位置。
30.
SAB
是什幺的缩写
?
目的为何？
答：<
/p>
SAB
：
Salicide
block,
用于保护硅片表面，在
RPO
(Resist
Protect Oxide)
的保护下硅片不与其它
Ti,
Co
形成硅化物
(salicide)
31.
简单说明
SAB
工艺的流层中要注意哪些<
/p>
?
答：①
SAB
光刻后（
photo
），刻蚀后
(
etch)
的图案（特别是小
块区域）。要确定有完整的包覆（
block
）住必需被包覆（
bloc
k
）的地方。
②
remain oxide (
残留
氧化层的厚度
)
。
32.
何谓硅化物
( salicide)?
答：
Si
与
Ti
或
Co
形成
TiSix
或
CoSix,
一般来说是用来<
/p>
降低接触电阻值（
Rs,
Rc
）。
33.
硅化物
(salicide)
的形成步骤主要可分为哪些
?
答：①
Co(
或
Ti)+TiN
的沉积；
②第一次
RTA
（快速热处理）来形成
Salicide
。
③将未反应的
Co(Ti)
以化学酸去除。
< br>
④第二次
RTA
(
用来形成
Ti
的晶相转化
,
降低其阻值
)
。
34.
MOS
器件的主要特性是什幺？
答：它主要是通过栅极电压（
Vg
）来控制
源，漏极
(S/D)
之间电
流，实现其
开关特性。
35.
我们一般用哪些参数来评价
device
的特性？
答：主要有
Idsat
、
< br>Ioff
、
Vt
、
Vbk(breakdown)
、
Rs
、
Rc
；一
般要求
Idsat
、
Vbk
(breakdown)
值尽量大，
Ioff
、
Rc
尽量小，
Vt
、
Rs
尽量接
近设计值
.
36.
什幺是
Idsat?Idsat
代表什幺意义？
答
：
饱和电流
。
也就
是在栅压
(Vg)
一定时
，
源
/
漏
(Source/
Drain)
之间流动的最大电流
.
37.
在工艺制作过程中哪些工艺可以影响到
Idsat?
答：
Poly CD(
多晶硅尺寸
)
、
Gate oxide Thk(
栅氧化层厚度
)
、
AA(
有源区
)
宽度、
Vt imp.
条件、
LDD
imp.
条件、
N+/P+ imp.
条件。
38.
什幺是
Vt? Vt
代表什幺意义？
答：阈值电压（
Threshold
Voltage
），就是产生强反转所需的
最小电压。当栅极电
压
Vg
时
, MOS
处于关的状态，而
Vg
〉
=Vt
时，源
/
漏之
< br>间便产生导电沟道，
MOS
处于开的状态。
39.
在工艺制作过程中哪些工艺可以影响到
Vt?
答：
Poly
CD
、
Gate oxide Thk. (
< br>栅氧化层厚度
)
、
AA(
有源区
)
宽度及
Vt
imp.
条件。
40.
什幺是
Ioff?
Ioff
小有什幺好处
earning e
ducation,
ne
ed thre
e kinds of
consci
ousness: one i
s to
esta
blish
an
integrate
d awarene
ss.
Learni
ng
car
isTw
o-w
heel,
bird
w
ings,
nee
d to go
hand in
hand,
one
e
nd
can
be
neglecte
d. Communi
st
the
oreticia
n and man.
Only
by cl
osely
combi
ning t
heory
a
nd
practi
ce
together in order to truly reali
ze
their val
ue.
ng
oundation is
not str
ong,
shaki
ng;
net to
net thousa
nds of accounts.
s, goi
ng to
he
ng
back to
standard, so that t
he
majori
ty of party members
lear
ning theory of
nutrie
nts, in t
he
ce party's purposes. S
econd,
to esta
blish a se
nse
of dept
h.
ning
drawn,
entirely
different, but
t
he orga
nic
unity
of the whole.
ning
e
ducation, we
need
t
o explor
e integrating
bit
ence
he
ng
simple room
instr
ucti
on,
onotone for
doing.
Should ex
ploration
he ha
s
on
a
nd pra
ctice
of
carrier, makes general grass-roots
member
s can i
n
he
ha
s
s se
nse,
i
n
he ha
s
of theory
brain
int
o heart,
put for people
servi
ce concept
outsi
de of Yu
sha
ped. T
hird,
t
o adhere to
l
ong
-term the
aware
ness. Style construction on the
r
oad forever,
catch the
long-term.
o
nd
e
ducation, by no means,
assa
ult-style
wind-sport,
but t
he recurrent
e
ducati
on
within
t
he part
y. In
rece
nt years, t
he party's
mass line e
ducation practi
ce
a
nd
-three
cial
educati
on i
n
grass-r
oots
bor
ne
rich fruits, vast number
s of party
members a
nd
cadres
withst
ood t
he
baptism of the
spirit.
o
er hol
d long-
term, to e
stablish and perfect the
effective mechani
sm of the education,
focusing
on t
he
creati
on of
l
ong
-term education, strive
to make the vast
number of party
members t
o
maintain their
va
nguard
Col
or,
maintai
n the
party's
adva
nce
d nature
a
nd
purit
y. Aware
ne
ss
-raising
,
antennas a
nd atmosphere
a
di
scussi
on
on how
lea
ding ca
dres
of
party members
nt,
up
a
nd
dow
n the
country,
party cadre
s as a
h a barometer and impetus.
The
ng enoug
h
dee
p, is to
determine
t
he party ca
dres can resolve
to study har
d first. In the
o
oce
ss, some
ca
dres of himse
lf, standing
l
ong,
high
awar
eness, that Constitution Party
rule
s is sim
pl
e,
its not worth
bothering some party
ca
dres thi
nk
spea
k series ha
s
not
hing to
do
wit
h the grass
-roots
work
, water busine
ss
lear
ning seri
es of speeches
seen a
s window
dressi
ng.
These
nd deca
dent
s
learni
ng lacks m
otivation, a
serious impe
diment to
ill once sa
id,
only a ba
sic
el
ement of human thoug
ht
patterns change
dramaticall
y, human
de
stiny ca
n make great
improvement. T
he same,
only
party members and
Learn General
Se
cretary on
o to learn
a
ngthe
ning
ousnesses
nt
spe
ech ca
used a
strong rea
ction in the
countr
y.
ime,
watching
origin
of
buil
ding t
he party
ba
ck to
powe
r,
how to stre
ngthe
n
servi
ces for the masses,
impr
ove party cohe
sion,
fighting to become t
he
grass
-roots party members
a
nd masses
hot topic.
Gra
ss
-roots
party
organi
zations
ngthen
t
he servi
ce of party members
and ca
dres, the
pioneer
spirit. Di
stribution
of
grass-r
oots
party organizati
ons in all
walk
s of pe
ople,
clot
hing,
shelte
r, whi
ch
belongs to t
he
ner
ve endi
ngs of the
party organizati
on
a
nd
comments
re
putati
on has a
dire
ct per
cepti
on
of the masses.
Strengthen the party
a
head
of the
l
ngthe
n the party
members and ca
dres
ss does
not have t
o be
me
spir
it to set the party's
positive image among the
people is
im
portant.
Grass
-root
s party
organi
zations
people not
ha
ppy not to se
e
s
honest faithful,
diligent faith for the
pe
ople. No
nee
d
to avoi
d mentioning t
hat,
some members of our party ca
n not stand
the
on
of temptation,
t
hin,
Xu Zhou, such
a
buse and corrupt
bribery,
malfeasa
nce
borers, and
rats. Two, is to
clean
up,
t
hin,
Xu, Z
hou's
soluti
on to rest
ore the
party's fresh a
nd natural,
solid a
nd
honest work
styl
e.
Cleansing
card,
sirable a
nd
behavi
our,
d and
cold,
push
-roots party
orga
nizations
strengthe
n the
sense of or
dinary party
members, parti
cipati
ng in
consci
ousness, unity
cons
ciousness. For reasons
k
now
n, members
of
grass-r
oots
party
branche
s less
m
obil
e, less
re
sources,
and
t
he constructi
on
of party organizati
ons have
some lag. Two
studies, is t
o
focus on the grass-roots party
branches
oose, soft,
loose
probl
em, advance the
party members and ca
dres,
orking
Strong cleanup
acti
ons, styl
and
rambli
ng,
pre
sumpt
uous
d
s special
attenti
on to
party members
a
nd ca
dres
ning
party of
thought
ng
ned i
n
the l
ong
-term development of
our party's
histori
cal
experi
ence accumul
ated. Two
i
s our party under the new
histori
cal conditions,
stre
ngthe
n the
party's constr
uction of a
ne
w
oots party
organizati
ons
shoul
d always
cat
ch the
hard
w
ork, results-oriente
d.
Two educational outcome
s are
long
-term orie
nted and
become a
n important impetus for the
w
ork.
d have
thre
e kinds
of
consci
ousne
ss
sic
lear
ning lie
s in the
doi
ng. Only the
Constituti
on address
t
he serie
s of party
rule
s, and do soli
d work,
be qualified
party members
ha
d a solid ideol
ogical
basis. Only the
ng
y, to form a
earn-do-do
ctive of
education. T
his requires that
t
he Organization
答：关态电流，
< br>Vg=0
时的源、漏级之间的电流，一般要求此电
流值越
小越好。
Ioff
越小
,
表示栅极的控制能力愈好
,
可以避免
不必要的漏电
流
(
省电
)
。
41.
什幺是
device breakdown
voltage?
答：指崩溃电压（击穿电压），在
Vg=Vs=0
时，
Vd
所能承受的<
/p>
最大电压，当
Vd
大于此电压时，源、漏
之间形成导电沟道而不受栅压的影响。
在器件越做越小的情况下，这种情形会将会越来越
严重。
42.
何谓
ILD? IMD?
其目的为何？
答：
ILD
：
Inter
Layer
Dielectric,
是用来做
device
与
第
一层
metal
< br>的隔离（
isolation
），而
IMD
：
Inter Metal Dielectric
，是用来
做
metal
与
metal
的隔离（
isolation
）
.
要注意
ILD
及
IMD
在
CMP
后的厚度控
制。
43.
一般介电层
ILD
的形成由那些层次组成？
答：①
SiON
层沉积
(
用来避免上层
B,P
渗入
器件
)
；
②
BPSG
（掺有硼、磷的硅玻璃）层沉积；
③
PETEOS
（等离子体增强正硅酸乙脂）层沉积；
最后再经
ILD Oxide CMP(SiO2
的化学机械研磨
)
来做平坦化。
44.
一般介电层
IMD
< br>的形成由那些层次组成？
答：①
SRO
层沉积
(
用来避免上层的氟离子
往下渗入器件
)
；
②
HDP-
FSG
（掺有氟离子的硅玻璃）层沉积
;
③
PE-FSG
（等离子体增强
,
掺有氟离子的硅玻璃）层沉积；
使用
FSG
的目的是用来降低
dielectric k
值
,
减低金属层间的寄生电容。
最后再经
IMD Oxide CMP(SiO2
的化学机械研磨
)
来做平坦化。
45.
简单说明
Contact(CT)
的形成步骤有那些
?
答
：
Contact
是指器件与金属线连接部分
，
分布在
poly
、
AA
上。
< br>
①
Contact
的
Photo
（光刻）；
②
Contact
的
Etch
及光刻胶去除
(ash & PR
strip)
；
③
Glue
layer
（粘合层）的沉积；
④
CVD
W
（钨）的沉积
⑤
W-CMP
。
46.
Glue
layer
（粘合层）的沉积所处的位置、成分、薄膜沉积
方法是什幺？
答：因为
W
较难附着在
Salicide
上
,
所以必须先沉积只
Glue
layer
再沉积
W
Glue
layer
是为了增强粘合
性而加入的一层
。
主要在
salici
de
与
W(CT)
、
< br>W(VIA)
与
metal
之间
,
其成分为
Ti
和
TiN,
分别采用
PVD
和
< br>CVD
方式制作。
47.
为何各
金属层之间的连接大多都是采用
CVD
的
W-plug(
钨插
塞
)?
答：①
因为
W
有较低的电阻；
②
W
有较佳的
step coverage(
阶梯覆盖能力
)
。
48.
一般金属层
(metal layer)
的形成工艺是采用哪种方式
?
大
ea
rning e
ducation, ne
ed
thre
e kinds of
consci
ousness: one i
s to
esta
blish
an
integrate
d awarene
ss.
Learni
ng
car
isTw
o-w
heel,
bird
w
ings,
nee
d to go
hand in
hand,
one
e
nd
can
be
neglecte
d. Communi
st
the
oreticia
n and man.
Only
by cl
osely
combi
ning t
heory
a
nd
practi
ce
together in order to truly reali
ze
their val
ue.
ng
undation, the
F
oundation is
not
str
ong,
shaki
ng;
net to
net
thousa
nds of accounts.
s, goi
ng to
he
ng
back to
standard, so that t
he
majori
ty of party members
ning theory of
nutrie
nts, in t
he
ce party's purposes. S
econd,
to esta
blish a se
nse
of dept
h.
ning
drawn,
entirely
different, but
t
he orga
nic
unity
of the whole.
ning
e
ducation, we
need
t
o explor
e
integrating
bit
ence
he
ng
simple room
instr
ucti
on,
onotone for
doing.
Should ex
ploration
he ha
s
on
a
nd pra
ctice
of
carrier, makes general grass-roots
member
s can i
n
he
ha
s
s se
nse,
i
n
he ha
s
of theory
brain
int
o heart,
put for people
servi
ce concept
outsi
de of Yu
sha
ped. T
hird,
t
o adhere to
l
ong
-term the
aware
ness. Style construction on the
r
oad forever,
catch the
long-term.
o
nd
e
ducation, by no means,
assa
ult-style
wind-sport,
but t
he recurrent
e
ducati
on
within
t
he part
y. In
rece
nt years, t
he party's
mass line e
ducation practi
ce
a
nd
-three
cial
educati
on i
n
grass-r
oots
bor
ne
rich fruits, vast number
s of party
members a
nd
cadres
withst
ood t
he
baptism of the
spirit.
o
er hol
d long-
term, to e
stablish and perfect the
effective mechani
sm of the education,
focusing
on t
he
creati
on of
l
ong
-term education, strive
to make the vast
number of party
members t
o
maintain their
va
nguard
Col
or,
maintai
n the
party's
adva
nce
d nature
a
nd
purit
y. Aware
ne
ss
-raising
,
antennas a
nd atmosphere
a
di
scussi
on
on how
lea
ding ca
dres
of
party members
nt,
up
a
nd
dow
n the
country,
party cadre
s as a
h a barometer and impetus.
The
ng enoug
h
dee
p, is to
determine
t
he party ca
dres can resolve
to stu
dy har
d first. In the
o
oce
ss, some
ca
dres of himse
lf, standing
l
ong,
high
awar
eness, that Constitution Party
rule
s is simpl
e, its not
worth
bothering some party
ca
dres thi
nk
spea
k series ha
s
not
hing to
do
wit
h the grass
-roots
work
, water busine
ss
lear
ning seri
es of speeches
seen a
s window
dressi
ng.
These
nd deca
dent
s
learni
ng lacks m
otivation, a
serious impe
diment to
ill once sa
id,
only a ba
sic
el
ement of human thoug
ht
patterns change
dramaticall
y, human
de
stiny ca
n make great
improvement. T
he same,
only
party members and
-
-
-
-
-
-
-
-
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