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学院《
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实验》实验报告
《先进材料表征技术》课程
学生实验报告
实验名称：
姓
名：
实验时间：
年
月
日
哈尔滨工业大学深圳研究生院
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学院《
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实验》实验报告
I
Purpose
1.
Be
familiar with the scanning electron microscope
structure and working principle;
2.
Be familiar with the requirements of
sample preparation.
II
Equipment
1. HitachiS-4700
SEM
2. EDAX Energy
Disperse Spectroscopy
III
Principle
1. SEM
SEM body as show in Figure
1. Mainly include the main electron microscope
electron optical system, the sample
chamber, a detector, and a vacuum
evacuation system power source circuit
system.
图
1
扫描电镜能谱仪
Figure 2 shows the
principle of SEM. An electron beam emitted from
the
electron gun , after the grid
focusing effect by acceleration voltage,
electron-
optical system through two or
three electromagnetic lenses, and then electron
beams will focus on the sample surface.
Shooting a high energy electron beam to
the sample material, we can get in a
variety of information: secondary electrons,
backscattered electrons, absorption of
electrons, X-rays, Auger electrons, cathode
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学院《
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< br>实验》实验报告
fluorescent and
transmission analyzing these information we
obtain the surface image of sample
material.
图
2
扫描电镜原理图
2.
EDS
EDS
mainly include the control and command system,
X-ray signal detection
system, signal
conversion and storage systems, data output and
display system
shown in Figure 3
.
图
3
能谱仪剖析图
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