半导体词汇缩写表

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半导体词汇缩写表

A/D

AA

AAS

ABC

ABM

AC

ACF

ACI

ACP

ACT

ADC

ADE

ADI

ADT

ADTSEM

AE

AEC

AECS

AEI

AEM

AES

AFM

AFP

Ag

A-GEMTF

AGV

AHF

AHU

AIR

Al

ALD

ALE

ALS

AMC

AMHS

AMT

analog to digital

atomic absorption

atomic absorption spectroscopy

activity-based costing

activity-based management

alternating current; activated carbon

anisotropic conductive film

after-clean inspection

anisotropic conductive paste

alternative control techniques; actual cycle time

analog-to-digital converter

advanced development environment

after-develop inspection

applied diagnostic technique

Apply/Develop Track Specific Equipment Model

atomic emission; acousticemission; absolute ellipsometry

advanced equipment controller

Advanced Equipment ControlSystem; Automated Equipment

Control System

after-etch inspection; automated equipment interface

analytical electron microscopy

Auger emission/electron spectroscopy

atomic force microscopy

abrasive-free polish

silver

Advanced GEM Task Force

automated guided vehicle

anhydrous hydrogen fluoride

air handling unit

automated image retrieval

aluminum

atomic layer deposition

atomic layer epitaxy; application logic element

advanced light source; advanced low-power Schottky

airborne molecular contamination

automated material handling system

advanced manufacturing technology

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AMU

ANN

ANOVA

AOV

AP

APA

APC

APCD

APCFI

APCVD

APEC

API

APM

APRDL

aPSM

AQI

AQL

Ar

AR

ARAMS

ARC

ARDE

ARPA

ARS

As

AS/RS

ASAP

ASIC

ASO

ASP

ASR

ATDF

ATE

ATG

ATLAS

atm

ATP

atomic mass unit

artificial neural network

analysis of variance

air- operated valve

adhesion promoter

advanced performance algorithm

advanced process control

add-on pollution control device

Advanced Process Control Framework Initiative

atmospheric pressure chemical vapor deposition

advanced process equipment control

application programming interface; atmospheric pressure

ionization

atmospheric passivation module; acoustic plate mode

Advanced Products Research and Development Laboratory

attenuating phase-shift mask

ACCESS query interface

acceptable quality level

argon

aspect ratio

Automated Reliability

antireflective coating

aspect ratio-dependent etching

Advanced Research Projects Agency (see DARPA)

angle-resolved scattering

arsenic

automated storage and retrieval system

Advanced Stepper Application Program

application- specific integrated circuit

automatic shutoff

advanced strip and passivation; advanced strip processor

automated send receive

Advanced ToolDevelopment Facility

automatic test equipment

automatic test generation

abbreviated test language for all systems

atmosphere

advanced technology program; adenosine triphosphate;

acceptance and tool performance

只供学习与交流

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ATR

Att

Au

AVP

AVS

AWE

AWISPM

AWS

B

Ba

BARC

BASE

BAW

BC

BDEV

BDS

Be

BEOL

BESOI

BF

BFGS

BFL

BGA

BHT

Bi

BiCMOS

BIFET

BIM

BiMOS

BIST

BIT

BITE

BMC

BMD

BOE

BOR

BOSS

BOX

BPR

attenuated total reflectance

attenuated

gold

advanced vertical processor

advanced visualization system

asymptotic waveform evaluation

above wafer in situ particle monitoring

advanced wet station

billion; boron

barium

bottom antireflective coating

Boston Area Semiconductor Education (Council)

bulk acoustic wave

bias contrast

behavior-level deviation

Brownian Dynamics Simulation

beryllium

back end of line

bonded and etchback silicon on insulator

brightfield

Broyden-Fletcher- Goldfarb-Shanno optimization algorithm

buffered field- effect transistor logic

ball grid array

Brinell hardness test

bismuth

bipolar complementary metal-oxide semiconductor

bipolar field-effect transistor

binary intensity mask

bipolar metal-oxide semiconductor

built-in self-test

bulk ion temperature

built-in test equipment

bubble memory controller

bulk micro defect

buffered oxide etchant

bottom of range

Book of SEMI Standards; binary object storage system

buried oxide

beam profile

reflectometry;

business process

reengineering

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BPSG

BPTEOS

Br

BSE

BTAB

BV

C

Ca

CA

CAA

CAB

CAD

CADT

CAE

CAI

CAM

CAPS

CAR

CARRI

CASE

CAT

CAW

CAWC

CBGA

CBS

CBT

CC

CCC

CCD

CCSL

CCW

Cd

CD

CD/OL

CDA

CDE

CDEM

CDI

boron phosphosilicate glass

BPSG from a TEOS source

bromine

backscattered electron detection

bumped tape automated bonding

breakdown voltage

carbon

calcium

CIM architecture

CIM applications architecture

Competitive Analysis Benchmarking

computer-aided design

control application development tool

computer-aided engineering

computer-assisted instruction

computer-aided manufacturing

computer-assisted problem solving

chemically amplified resist

Computerized Assessment of Relative Risk Impacts

computer-aided

softwareengineering;

computer-aided

systems

engineering

computer-aided testing

Construction Analysis Workgroup

cryogenic aerosol wafer cleaning

ceramic ball grid array

chemical bottle storage area

computer-based training

chip carrier; cluster controller

ceramic chip carrier

charge-coupled device

compatible current-sinking logic

counterclockwise

cadmium

critical dimension

critical dimension overlay

clean dry air

chemical downstream etch

Customer Delivery Enterprise Model

collector-diffusion isolation

只供学习与交流

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CDM

CDO

CDR

CDS

Ce

CE

CEC

CEE

CEM

CER- DIP

CFA

CFC

CFD

CFM

CIC

CID

CIE

CIM

CIM- OSA

CIP

CIS

CISC

Cl

CLCC

CLIC

CM

CMC

CML

CMM

CMOS

CMP

CMR

CNC

CNT

Co

COB

COC

CODEC

Common Device Model for SAB

controlled decomposition/oxidation

chemical distribution room

chemical distribution system

cerium

capillary electrophoresis

cell evaluation chip

control execution environment

continuous emissions monitoring

ceramic dual in-line package

component failure analysis

chlorofluorocarbon

computational fluid dynamics

contamination-free manufacturing

cleanroom interface chamber

charge-injection device

computer-integrated engineering

computer-integrated manufacturing

computer-integrated manufacturing-open systems

architecture (ESPRIT program)

Continuous Improvement Program

Center for Integrated Systems

complex instruction set computer

chlorine

ceramic leaded chip carrier

closed-loop intensity control

configuration management; cassette module

cassette module controller

current mode logic

capability maturity model

complementary metal-oxide semiconductor

chemical mechanical planarization

common-mode rejection ratio; cancel move request

computer numerical control; condensation nucleus counter

carbon nanotube

cobalt

chip-on-board

cost of consumables

coder-decoder

只供学习与交流

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COED

COGS

CoO

CORBA

CORE

COSS

COT

CoV

Cp

CPD

CPE

CPGA

Cpk

CQFP

CQN

Cr

CRC

CRM

Cs

CSA

CSE

CSF

CSL

CSMA/CD

CSP

CSPED

CST

CSTR

CSV

CTC

CTE

CTI

CTMC

Cu

CUB

CUBES

CUI

CUSUM

computer- optimized experimental design

cost of goods sold

cost of ownership

common object request broker architecture

composite object reference

common object services specification

customer-owned tooling

coefficient of variance

process capability

concurrent product development

Communications

ceramic pin grid array

process capability index

ceramic quad flat pack

closed-queuing network

chromium

cyclic redundancy check

Cost/Resource Model

cesium

CIM systems architecture

control systems engineering

critical success factor

current-steering logic

carrier-sense

chip-scale package

concurrent semiconductor production and equipment

development

CIM systems technology

continuously stirred tank reactor

comma-separated variable

cluster tool controller

coefficient of thermal expansion

cycle time improvement

cluster tool modular communications

copper

central utility building

capacity utilization bottleneck efficiency system

common user interface

cumulative sum

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CV

CVCM

CVD

CW

Cz

D/A

D/B

DAC

DAS

DASSL

DBMS

DC

DCA

DCATS

DCE

DCL

DCS

DDL

DDMS

DEDS

DES

DF

DFC

DFE

DFM

DFR

DFT

DFY

DHF

DI

DIBL

DIC

DIL

DIP

DLBI

DLOC

DLS

DLT

DLTS

capacitance- to-voltage

collected volatile condensable materials

chemical vapor deposition

continuous wave

Czochralski process

digital to analog

die bonding

digital-to-analog converter

direct absorption spectroscopy

differential algebraic system solver

database management system

direct current

direct chip attachment

double-contained acid transfer system

distributed computer environment

digital command language; display communication log

dichlorosilane

device description language

defect data management system

discrete-event dynamic simulation

data encryption standard; display equipment status

darkfield

densified fluid clean

dual-frequency etch

design for manufacturing

design for reliability

design for test

design for yield

dilute hydrofluoric acid

deionized; dielectric isolation

drain-induced barrier leakage

differential interference contrast

dual in-line

dual in-line package

device-level burn-in

developed source lines of code

display lot status

device- level test

deep-level transient spectroscopy

只供学习与交流

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DMA

DMH

DML

DMM

DMOS

DMR

DO

DOA

DOAS

DOE

DOF

DOP

DPA

DPM

DPP

DPSRAM

DRAM

DRAPAC

DRC

DRE

DRIFTS

DRT

DSA

DSC

DSMC

DSQ

DSS

DSW

DT

DTA

DTC

DTL

DTM

DTMPN

DUT

DUV

DV

DVER

direct memory access; dynamic mechanical analysis

display message helps

data manipulation language; display message log

digital multimeter

diffused metal-oxide semiconductor

display move requests

dynamic optimization

dead-on alignment

differential optical absorption spectroscopy

design of experiments

depth of focus

dioctylphthalate

destructive physical analysis

digital panel meter

discharge-produced plasma

dual-port static random access memory

dynamic random access memory

Design Rule and Process Architecture Council

design rule check

destruction removal efficiency

diffuse

reflectance

infrared

Fourier

transform

spectroscopy

defect review tool

display system activity; dimensionally stable anode

differential scanning calorimetry

direct simulation Monte Carlo

downstream quartz

display stocker status

direct step-on-wafer

dynamic test

differential thermal analysis

direct thermocouple control

diode transistor logic

defect test monitor; delay time multiplier; device test

module; digital terrain map

defect test monitor phase number

device under test

deep ultraviolet

design verification

design rule verification

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DVM

DVS

DWG

EAPSM

EAROM

EASE

e-beam

EBHT

EBIC

EBR

EC

ECA

ECAD

ECAE

ECL

ECN

ECO

ECQB

ECR

EDA

EDS

EDU

EDX

EDXA

EEDF

EELS

EEPROM

EFEM

EFOCS

EFTIR

EFV

EGE

EHS

EI

EID

EIP

EIS

digital voltmeter

display vehicle status

domain work group

embedded attenuated phase-shift mask

electrically alterable read-only memory

equipment and software emulator

electron beam

electron-beam high-throughput lithography

electron beam-induced current

edge bead removal

engineering change; equipment controller

engineering capability assessment

electronic computer-aided design; engineering

computer-aided design

electronic computer-aided engineering

emitter coupled logic

engineering change notice

engineering change order

electrochemical quartz crystal balance

electron cyclotron resonance

electronic design automation

energy-dispersive spectroscopy

equipment-dependent uptime

energy-dispersive X-ray

energy-dispersive X-ray analysis

electron energy distribution function

electron energy-loss spectroscopy

electrically erasable programmable read-only memory

equipment front-end module

evanescent fiber-optic chemical sensor

emission Fourier transform infrared spectroscopy

excess flow valve

ethylene glycol ethers

extremely hazardous substance

equipment integration

Equipment InterfaceDevelopment

Equipment Improvement Program; Equipment Improvement

Project

electrochemical impedance spectroscopy

只供学习与交流

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EKF

ELF

EM

EMA

EMC

EMF

EMG

EMI

EMMA

EMP

EMR

EMU

EOS

EOT

EP

EPL

EPR

EPROM

EPSS

EPT

EQUIP

EQUIP

ERAM

ERM

ERN

ERP

ERS

ERT

ES

ESC

ESCA

ESD

ESH

ESM

ETAB

ETQR

EUV

eV

EWMA

extended Kalman filter

extremely low frequency

enterprise model; electromagnetic; electromigration

equipment maturity assessment

electromagnetic capability; electromagnetic compatability

electromagnetic field

electromigration

electromagnetic interference

electron microscopy and microanalysis

electromagnetic pulse

enter move request

electromagnetic unit

electrical overstress

end of transfer; equivalent oxide thickness

extreme pressure; electropolish

electron projection lithography

electron paramagnetic resonance

electrically programmable read-only memory

electronic performance support system

equipment performance tracking

C/I equipment control and integration

RTC equipment real-time control

equipment reliability

enterprise reference model

external recurrent neural network

extended range pyrometer

event reporting standard

emergency response time

engineering specification; expert system

electrostatic chuck

electron spectroscopy for chemical analysis

electrostatic discharge

environment

electronic service manual

Executive Technical Advisory Board

External Total Quality and Reliability

extreme ultraviolet

electron volt

exponentially weighted moving average

只供学习与交流

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F

F/I

FA

FAB

FAMOS

FBGA

FC

FCM

FCS

FDC

FDE

FDSOI

Fe

FEC

FEM

FEOL

FESEM

FET

FFT

FFU

FI

FIB

FID

FIFO

FIMS

FL

FLOPC

FLOTOX

FLRT

FM

FMEA

FMMC

FMVP

FNN

FOCS

FOSB

FOUP

FOV

fluorine

final inspection

failure analysis

fast atom bombardment

floating-gate avalanche-injection metal-oxide

semiconductor

fine-pitch ball grid array

flip chip

facilities cost model

factory control system

fault detection and classification

frequency domain experiments

fully depleted silicon on insulator

iron

fabrication evaluation chip

finite element model

front end of line

field emission scanning electron microscopy

field-effect transistor

fast Fourier transform

filter fan unit

filterability index; factory integration

focused ion beam

flame ionization detector

first-in

front-opening interface mechanical standard

fuzzy logic

floating point operations needed per cycle

floating gate tunnel oxide

factory layout/relayout tool

foreign material

failure mode and effects analysis

factory material movement component

Framework Member Validation Project

feed-forward neural network

fiber-optic chemical sensor

front opening shipping box

front opening unified pod

field of view

只供学习与交流

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FOX

FP

FPD

FPGA

FPLA

FPLF

FPLS

FPMS

FPROM

FRACAS

FRAME

FRMB

FSG

FSM

FT

FTA

FTAB

FTIR

FW

FWHM

FZ

Ga

GAC

GC

GCC

GCD

GCMS

GDPP

GDS

Ge

GEM

GEMVS

GES

GFC

GFCI

GIDL

GILD

GLC

GOI

field oxide

flash point

focal plane deviation; flat panel display

field- programmable gate array

field- programmable logic array

field- programmable logic family

field- programmable logic switch

Factory Performance Modeling Software

field- programmable read-only memory

Failure Reporting

Failure Rate Analysis and Modeling

fast ramp mini batch

fused silica glass

finite state machine

final test; Fourier transform

fault tree analysis

Focus Technical Advisory Board

Fourier transform infrared

full wave

full-width half- maximum

float zone

gallium

granular activated carbon

gas chromatography; gravimetric calibrator

generic cell controller

gas chromatography distillation

gas chromatography mass spectroscopy

gas drive plasma pinch

graphical design system; graphical design software

germanium

Generic EquipmentModel

GEM verification system

generic equipment simulator

gas filter correlation

ground fault circuit interrupter

gate-induced drain leakage

gas immersion laser doping

gas liquid chromatography

gate oxide integrity

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GPIB

GSCE

GTS

H

HAP

HARI

HAST

HAZCOM

HB

HCI

HCM

HCMOS

HCS

HD

HDL

HDP

HDPE

He

HEM

HEPA

Hf

HF

Hg

HIBS

HiPOx

HLF

HMDS

HMIS

HMMP

HMOS

HOMER

HOPG

HP

HPEM

HPI

HPL

HPLC

HPM

HPV

general- purpose interface bus

gas source control equipment

GEM Test System

hydrogen

hazardous air pollutant

high aspect ratio inspection

highly accelerated stress testing

Hazard Communication Standard

horizontal Bridgeman crystal

hot carrier injection

hollow cathode magnetron

high-density CMOS

hot-carrier suppressed

high density

hardware description language

high-density plasma

high- density polyethylene

helium

high-efficiency matching

high-efficiency particulate air

hafnium

hydrofluoric acid

mercury

heavy ion backscattering spectrometry

high- pressure oxygen

horizontal laminar flow

hexamethyldisilizane

hazardous materials inventory statement

hazardous materials management plan

high-performance MOS; high-density MOS

hazardous organic mass emission rate

highly oriented pyrolitic graphite

high purity

Hybrid Plasma Equipment Model

high pressure isolation

high-performance logic

high- performance liquid chromatography

hazardous production materials; high- purity metal

high-pressure vent

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HRA

HRR

HRTEM

HSQ

HTO

HTRB

HUPW

HVAC

I

I/O

I2L

I300I

IC

ICAP

ICMS

ICP

ICP- AES

ICP-MS

ICT

IDDQ

IDEAL

IDL

IDLH

IDS

IEA

IEC

IEDF

IERN

IF

IGFET

ILB

ILD

ILS

IM

IMD

IMMA

IMS

In

INCAMS

human reliability analysis

high ramp rate

high-resolution transmission electron microscopy

hydrogen silsesquioxane

high-temperature oxidation

high-temperature reverse bias

hot ultrapure water

heating

iodine

input/output

integrated injector logic

International 300 mm Initiative

integrated circuit; Investment

Council;

ion

chromatography

inductively coupled argon-plasma spectrometry

integrated circuit measurement system

inductively coupled plasma

inductively coupled plasma atomic emission spectroscopy

inductively coupled plasma mass spectrometry

ideal cycle time

direct drain quiescent current

initiating

interface definition language

immediately dangerous to life or health

interactive diagnostic system

ion energy analysis

infused emitter coupling

ion energy distribution function

internal- external recurrent neural network

interface

insulated-gate field-effect transistor

inner lead bond

interlevel dielectric; interlayer dielectric

intracavity laser spectroscopy

integrated model; integrated metrology

intermetal dielectric

ion microphobe mass analysis

ion mobility spectroscopy

indium

individual cassette manufacturing system

只供学习与交流

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IPA

IPL

IPT

Ir

IR

IRAS

IRIS

IRN

IRONMAN

IRTC-1

IS

ISC

ISEM

ISM

ISMT

ISPM

ISR

ISS

ITRI

ITRS

IVH

IVP

JDP

JEDEC

JESSI

JIC

JIT

JJT

JVD

K

keV

KPA

Kr

kV

La

LAMMA

LAMMS

LC

isopropyl alcohol

ion projection lithography

ideal process time

iridium

infrared

infrared reflection-absorption spectroscopy

imaging of radicals interacting with surfaces

internal recurrent neural network

Improving Reliability of New Machines at Night

interconnect reliability test chip-1

information systems; interface specifications; integrated

systems

Industry Steering Council

inspection/review specific equipment model

inductor super magnetron

International SEMATECH

in situ particle monitor

in situ rinse

ion scattering spectroscopy

Interconnection Technology

International Technology

interstitial via hole

integrated vacuum processing

Joint Development Program

Joint Electron Device Engineering Council

Joint European Submicron Silicon Initiative

Joint Industrial Council

just-in-time

Josephson junction transistor

jet vapor deposition

potassium; thousand

kilo electron volt

key process area

krypton

kilovolt

lanthanum

laser micro-mass analysis

laser micro-mass spectroscopy

inductance-capacitance; liquid chromatography

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LCA

LCC

LCL

LDD

LDL

LDP

LDPE

LEC

LEL

LER

LF

LFL

LGQ

Li

LI

LIC

LID

LIFO

LIMA

LIMS

LLCC

LLD

LLNQ

LM

LMMA

LOCOS

LOS

LPC

LPCVD

LPD

LPE

LPI

LPP

LRS

LSE

LSHI

LSI

LSM

lifecycle analysis

leaded chip carrier

lower confidence limit

lightly doped drain

lower detection limit

low-density plasma

low-density polyethylene

liquid encapsulated Czochralski crystal

lower explosive limit

line edge roughness

laminar flow

lower flammable limit

linear Gaussian quadratic

lithium

laser interferometry

linear integrated circuit

leadless inverted device

last in

laser-induced mass analysis

laser-induced mass spectrometry

leadless chip carrier

lower limit of detection

least lots next queue

light microscope

laser microprobe mass analysis

local oxidation of silicon

loss of selectivity

linear predictive coding; laser particle counter; low

particle concentration; liquid-borne particle counter

low-pressure chemical vapor deposition

light point defect

liquid phase epitaxy

low- pressure isolation

laser-produced plasma

laser Raman spectroscopy

latex sphere equivalent

large-scale hybrid integration

large-scale integration

laser scanning microscope

只供学习与交流