氧化锌的拉曼频移-应力定量关系研究

2021年1月15日发(作者：席慧文)
氧化锌的拉曼频移-应力定量关系研究
刘武;赵华成;项春;卢孔宝


【期刊名称】《浙江水利水电专科学校学报》

【年(卷),期】2017(029)002

【摘要】在MEMS器件制备过程中, 对微区域的应力状态测量与监控至关重要.
建立了氧化锌材料的拉曼应力测量技术理论,推导出了氧化锌 材料的拉曼频移-
应力分量解析关系式.ZnO单晶体属于6 mm点群结构具有两个A1、E1和E2
共六中线性振动模式.从微扰势出发并结合胡克定律出发,推导出了A1 、E1和
E2模的拉 曼位移变化与应力分量之间的关系,在这些方程式中,共包含20个未知
参数.最后给出了氧化锌材料的 拉曼频移-应力关系式,为ZnO残余应力测量提供
理论依据.%It is very important to grasp the stress states in the sub- area
for the fabrication of MEMS stress measurement theory
suitable for ZnO material was investigated, analytical mathematical
expressions for the relationship between the Raman shift and the stress
was material belongs to 6mm point group with two A1、
E1 and E2 vibration mode Raman relationships between the
change of Raman shift and stress component for A1、E1 and E2 models
are theoretically derived based on perturbation potential and Hooke`s
these equations, 20 unknown parameters are
relationship between the Raman shift and the stress is put forward,
which is helpful to provide a theoretical guidance in the ZnO residual
stresses.